Influence of ion beam incidence angle on thermal effect

Abstract

During the optical components figuring by ion beam, the temperature of the optical component will rise quickly because of the collision between the ions and the atoms of the optical component. In order to investigate the thermal effect of the ion beam figuring, the thermal deposition model is established based on the Sigmund theory of sputtering, and the thermal power density function of the surface heat source is obtained. Moreover, the thermal power density function is also modified based on the geometric relationship between surface of optical component and ion beam for establishing the incidence of the angle of ion beam to thermal power density. On this basis, the CAE (Computer Aided Engineering method was used to simulate the progress of the BK7 glass figuring by ion beam. And the modified thermal power density function is programed as heat flow load in the CAE model. The total power of thermal deposition under the different incidence angle of ion beam was obtained by Monte Carlo method. The result shows that the modified thermal power density function is close to the experimental result in other literatures. Meanwhile, the result shows the deposition energy and the maximum stress decrease with the increase of incidence angle.