2022
DOI: 10.1007/s12633-022-01959-2
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Influence of Laser Annealing of Silicon Enriched SiOx Films on their Electrical Conductivity

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“…Due to the high quality of energy concentration, wavelength, and pulse control, the laser has a high prospect in the fields of information transmission, micro- and nano-processing [ 22 , 23 , 24 ], and so on. Laser annealing, in particular, is a very special kind of heat treatment frequently used for semiconductor devices, showing a quite different way to traditional thermal annealing.…”
Section: Introductionmentioning
confidence: 99%
“…Due to the high quality of energy concentration, wavelength, and pulse control, the laser has a high prospect in the fields of information transmission, micro- and nano-processing [ 22 , 23 , 24 ], and so on. Laser annealing, in particular, is a very special kind of heat treatment frequently used for semiconductor devices, showing a quite different way to traditional thermal annealing.…”
Section: Introductionmentioning
confidence: 99%