Influence of magnetic field gradient on the capacitive argon discharge at 8 MHz and 40 MHz

Wu, Huanhuan; Zhang, Tianxiang; Wu, Hao; Yang, Shali

doi:10.1088/1361-6595/accd19

Cited by 2 publications

(1 citation statement)

References 55 publications

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“…Capacitively coupled plasmas (CCPs) driven by radio frequency (RF) waveforms have a wide range of applications in the semiconductor industry and are basic tools in biomedical applications [1][2][3][4][5]. Study of processing plasmas is driven by the motive of understanding the complex physical and chemical interactions as well as improving performance and control in such systems [6][7][8]. In plasma processing applications electronegative gases are frequently diluted with electropositive gases.…”

Section: Introductionmentioning

confidence: 99%

Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas

Derzsi,

Vass,

Masheyeva

et al. 2024

Plasma Sources Sci. Technol.

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Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collision (PIC/MCC) simulations are performed to investigate the excitation dynamics in low-pressure capacitively coupled plasmas (CCPs) in argon-oxygen mixtures. The system used for this study is a geometrically symmetric CCP reactor operated in a fixed mixture gas composition, at fixed pressure and voltage amplitude, with a wide range of driving RF frequencies (2 MHz ≤ f ≤ 15 MHz). The measured and calculated spatio-temporal distributions of the electron impact excitation rates from the Ar ground state to the Ar 2p1 state (with a wavelength of 750.4 nm) show good qualitative agreement. The distributions show significant frequency dependence, which is generally considered to be predictive of transitions in the dominant discharge operating mode. Three frequency ranges can be distinguished, showing distinctly different excitation characteristics: (i) in the low frequency range (f ≤ 3 MHz), excitation is strong at the sheaths and weak in the bulk region; (ii) at intermediate frequencies (3.5 MHz ≤ f ≤ 5 MHz), the excitation rate in the bulk region is enhanced and shows striation formation; (iii) above 6 MHz, excitation in the bulk gradually decreases with increasing frequency. Boltzmann term analysis was performed to quantify the frequency dependent contributions of the Ohmic and ambipolar terms to the electron power absorption.

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Section: Introductionmentioning

confidence: 99%

Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas

Derzsi,

Vass,

Masheyeva

et al. 2024

Plasma Sources Sci. Technol.

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Effects of magnetic field gradient on capacitively coupled plasma driven by tailored voltage waveforms

Wu,

Yan,

et al. 2024

Journal of Vacuum Science &Amp; Technology A

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This study utilized one-dimensional implicit particle-in-cell/Monte Carlo collision simulations to investigate the impact of different harmonic numbers and magnetic field strengths on capacitive-coupled argon plasma. Under the conditions of a pressure of 50 mTorr and a voltage of 100 V, simulations were conducted for magnetic field strengths of 0 and 100 G, magnetic field gradients of 10–40, 10–60, 10–80, 10–100, and 100–10 G, as well as discharge scenarios with harmonic numbers ranging from 1 to 5. Through in-depth analysis of the results, it was observed that the combined effect of positive magnetic field gradients and harmonic numbers can significantly enhance plasma density and self-bias properties to a greater extent. As the magnetic field gradient increases, the combined effect also increases, while an increase in harmonic numbers weakens the combined effect. Furthermore, this combined effect expands the range of control over ion bombardment energy. This provides a new research direction for improving control over ion energy and ion flux in capacitive-coupled plasmas.

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Influence of magnetic field gradient on the capacitive argon discharge at 8 MHz and 40 MHz

Cited by 2 publications

References 55 publications

Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas

Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas

Effects of magnetic field gradient on capacitively coupled plasma driven by tailored voltage waveforms

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