Influence of Microstructure on Pass through Flux of High Purity Ni

Abstract

Pass through flux (PTF) is an essential parameter for the magnetron sputtering process of ferromagnetic materials. In the present investigation the influence of deformation, recrystallized microstructure and thickness on PTF of Ni was examined by the analysis of microstructure and hardness of high purity Ni. The experimental results showed that PTF of rolled Ni increased significantly comparing to the annealing microstructure that is related to the dislocation and stress of microstructure. With the recrystallization and grain growth of deformed samples, PTF decreased to be about 30%. PTF was also associated with the thickness of material. It increased by 6% when the thickness of 0.5mm decreased. This research is useful to guide and improve the design, development and preparation of magnetic sputtering materials.

Development of Ferromagnetic Sputtering Targets with High Performance

“…In Magnetron sputtering deposition of magnetic thin films, the problems of ferromagnetic materials sputtering limit the production and application of high performance magnetic thin films and devices [8]. Pass through flux (PTF) of a magnetic sputtering target is defined as the ratio of dc magnetic field transmitted through a ferromagnetic sputtering material [9,10]. PTF is an essential parameter for the magnetron sputtering process of ferromagnetic materials.…”