2013
DOI: 10.7567/apex.7.012102
|View full text |Cite
|
Sign up to set email alerts
|

Influence of miscut angle of Si(111) substrates on the performance of InGaN LEDs

Abstract: As the angle of the miscut of a Si(111) substrate increases, the luminous efficiency of InGaN LEDs decreases dramatically, along with a considerable blue shift of emission wavelength. The blue shift of the wavelength and the decrease in the efficiency are found to originate from the reduced indium incorporation and the poor uniformity of the quantum wells. The origin of the nonuniform indium incorporation of the samples is attributed to the surface morphologies formed by step bunching, as confirmed by atomic f… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2014
2014
2023
2023

Publication Types

Select...
4

Relationship

0
4

Authors

Journals

citations
Cited by 4 publications
(2 citation statements)
references
References 20 publications
0
2
0
Order By: Relevance
“…In order to have the same wavelength, the growth temperature of InGaN in SQW-LED is lower, 10 °C, than MQW-LED. The grown wafers are processed to vertical N-side up chip structure by using a thin-film approach [13][14][15][16]…”
Section: Methodsmentioning
confidence: 99%
“…In order to have the same wavelength, the growth temperature of InGaN in SQW-LED is lower, 10 °C, than MQW-LED. The grown wafers are processed to vertical N-side up chip structure by using a thin-film approach [13][14][15][16]…”
Section: Methodsmentioning
confidence: 99%
“…While miscut wafers have become the de-facto standard for light-emitting diodes grown on sapphire, the situation is not as clear for SiC and Si. There are some publications addressing the influence of wafer miscut on growth on SiC [ 15 , 16 ], sapphire [ 17 , 18 ] and Si [ 19 ], but there are limited data on HEMT structures grown on miscut Si(111) wafers. The paper [ 20 ] reported a gradual improvement in HEMT properties with the miscut angle increased to 1.0 degree, but no analysis was presented.…”
Section: Introductionmentioning
confidence: 99%