2002
DOI: 10.1016/s0022-0248(02)01348-9
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Influence of MOVPE growth conditions on carbon and silicon concentrations in GaN

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Cited by 267 publications
(210 citation statements)
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“…Notably, growth of higher indium compositions requires lower temperatures, which are expected to contribute to higher point defect and impurity concentrations [44]. Thus, for green and longer visible wavelength materials, point defects may play a significantly greater role than for shorter wavelength materials.…”
Section: Point Defectsmentioning
confidence: 99%
“…Notably, growth of higher indium compositions requires lower temperatures, which are expected to contribute to higher point defect and impurity concentrations [44]. Thus, for green and longer visible wavelength materials, point defects may play a significantly greater role than for shorter wavelength materials.…”
Section: Point Defectsmentioning
confidence: 99%
“…Further, to controllably incorporate greater concentrations of carbon, the growth pressure is generally lowered and thus potentially changing the native defect level in addition to changing the carbon impurity level or concentration. 22 Despite these shortcomings, experimental results from Seager et al strongly suggest that carbon in MOVCD growth will incorporate as a shallow acceptor when the Fermi level is near the conduction band and will tend to self-compensate otherwise. 21 This explanation is also consistent with the experimental evidence that films grown at low pressure show deep levels and one of these deep levels associated with carbon has been found to cause current collapse in field effect transistor structures.…”
Section: Introductionmentioning
confidence: 99%
“…This is to reduce the rate of indium desorption during growth. This lower temperature has been shown to lead to a higher density of structural defects and impurity incorporation [10,11]. Of particular relevance is evidence that a higher density of point defects is introduced when layers of higher indium content are grown at a reduced temperature [13][14][15][16][17], and these point defects have been shown to act as non-radiative recombination centres [18].…”
mentioning
confidence: 99%