2010
DOI: 10.1016/j.diamond.2010.01.038
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Influence of nitrogen plasma post-treatment on diamond-like carbon films synthesized by RF plasma enhanced chemical vapor deposition

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“…The increase of voltage (above 5 kV) resulted in the increase of ion energy, leading to the better erosion effect. This change trend of our study was consistent with other researches [41].…”
Section: Sem Analysissupporting
confidence: 94%
“…The increase of voltage (above 5 kV) resulted in the increase of ion energy, leading to the better erosion effect. This change trend of our study was consistent with other researches [41].…”
Section: Sem Analysissupporting
confidence: 94%