Various methods, based on both surface frequency and direction, can be alternatively proposed to reduce the influence of high-frequency measurement and data analysis errors. Various types of details were studied, e.g., cylinder liners after the plateau-honing process, plateau-honed cylinder liners with additionally burnished oil pockets (dimples), turned, ground, milled or laser-textured. They were measured with stylus or non-contact (optic) techniques. It was suggested to support various frequency-based methods, e.g., Frequency Spectrum, Power Spectral Densities or Autocorrelation Function, with direction techniques to provide reduction of errors in both detection and extraction of high-frequency measurement errors. Results can be especially valuable for regular studies when frequency-based measurement errors are difficult to be identified.