“…The main reasons for the damage of optical components under intense laser irradiation are high power density, uneven field intensity, material characteristics and surface contamination [8] . Although the damage threshold of optical components can be improved by increasing the size of optical components, optimizing near-field distribution, coating treatment, laser pretreatment and cleaning process, the performance of optical components is still gradually decreased after long-term use in high-power laser facilities, which is mainly due to the contamination in vacuum environment [9][10][11][12][13][14] . Under intense laser irradiation, the damage threshold of contaminated optical components decreases by about 60%, and the damage defect area increases significantly [15] .…”