SiO
x
(x ≈ 1)
is one of the most promising anode materials for application in secondary
lithium-ion batteries because of its high theoretical capacity. Despite
this merit, SiO
x
has a poor initial Coulombic
efficiency, which impedes its widespread use. To overcome this limitation,
in this work, we successfully demonstrate a novel synthesis of Mg-doped
SiO
x
via a mass-producible physical vapor
deposition method. The solid-state reaction between Mg and SiO
x
produces Si and electrochemically inert
magnesium silicate, thus increasing the initial Coulombic efficiency.
The Mg doping concentration determines the phase of the magnesium
silicate domains, the size of the Si domains, and the heterogeneity
of these two domains. Detailed electron microscopy and synchrotron-based
analysis revealed that the nanoscale homogeneity of magnesium silicates
driven by cycling significantly affected the lifetime. We found that
8 wt % Mg is the most optimized concentration for enhanced cyclability
because MgSiO3, which is the dominant magnesium silicate
composition, can be homogeneously mixed with silicon clusters, preventing
their aggregation during cycling and suppressing void formation.