Influence of PECVD parameters on the properties of diamond-like carbon films

Caschera, Daniela; Cossari, Pierluigi; Federici, F.; Kačiulis, S.; Mezzi, A.; Padeletti, G.; Trucchi, Daniele M.

doi:10.1016/j.tsf.2011.01.197

Cited by 65 publications

(42 citation statements)

References 28 publications

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“…As example, smooth a-CH x films has been observed at low pressure work conditions, whereas the development of rougher microstructures were possible by increasing the pressure [13]. Other experimental parameters can provide different ratios of sp 2 and sp 3 carbon bonds and hydrogen contents [14][15][16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Investigation of the Growth Mechanisms of a-CH_x Coatings Deposited by Pulsed Reactive Magnetron Sputtering

et al. 2012

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The study of the growth mechanisms of amorphous hydrogenated carbon coatings (a-CH x ) deposited by reactive pulsed magnetron discharge in Ar+C 2 H 2 , Ar+H 2 and Ar+C 2 H 2 +H 2 low pressure atmospheres is presented in this work. Hydrogen-containing species of the reactant gas affect the microstructure and surface properties of the a-CH x thin films. The dynamic scaling theory has been used to relate the main reactive species involved in the deposition process to the growth mechanisms of the thin film by means of the analysis of the roughness evolution. Anomalous scaling effects have been observed in the smooth a-CH x coatings. Dynamic scaling exponents α, β and z indicate a general growth controlled by surface diffusion mechanisms. Hydrogen species have an influence on the lateral growth of the a-CH x coatings and are involved in the development of a polymeric-like structure. Meanwhile, hydrocarbon species promote the generation of 2 higher aggregates that increases the roughness of a more sp 2 clustering structure of the aa-CH x coating.

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Section: Introductionmentioning

confidence: 99%

Investigation of the Growth Mechanisms of a-CH_x Coatings Deposited by Pulsed Reactive Magnetron Sputtering

et al. 2012

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“…Plasma pre-treatments and DLC depositions are performed in a PECVD apparatus (Caschera et al 2011) operating at 13.56 MHz and room temperature. The H 2 or O 2 plasma etching is performed on the cotton substrates at room temperature and at 50 W RF power for 10, 30 and 60 min and 10 sccm of gas flow.…”

Section: Methodsmentioning

confidence: 99%

Flame retardant properties of plasma pre-treated/diamond-like carbon (DLC) coated cotton fabrics

et al. 2015

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Textiles with superior anti-flammability properties combined with minimal environmental impact are extremely necessary to reduce fire-related issues. In this regard, diamond-like carbon (DLC) coatings on cotton fabrics may represent promising candidates as potential flame-retardant (FR) materials. Herein, superhydrophobic and fire-resistant cotton fabrics were fabricated through a two-step plasma strategy by alternately exposing substrates to H 2 and O 2 plasma pre-treatments and subsequent DLC deposition. Fourier transform-infrared spectroscopy analysis has revealed that different plasma pre-treatments can impose surface modifications on the chemical structure of cotton, especially in carboxylic and hydroxyl groups, leading to a radical alteration of surface roughness and of the crystalline cellulosic external structure. These changes deeply influenced the growth of DLC thin films and the surface properties of cotton fabric because of the combination of a hierarchical structure and surface chemistry as verified using field emission gun-scanning electron microscopy and water contact angle measurements. The effects of both specific gases used in the pretreatment step and duration of pre-treatment were analysed and compared using thermogravimetric analyses. The H 2 -pre-treated DLC cottons exhibited good potential as an FR material, showing improved thermal stability in respect to untreated cotton, as evidenced by increased ignition times. Moreover, vertical burning tests have demonstrated that DLCcotton systems exhibit enhanced flammability resistance.

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“…Synthesis of high-quality and controllable carbon films has been a hot spot for decades. Alternatively, ethanol has been considered as a useful precursor since its low-cost and environment-friendly [7,8]. Furthermore, plasma enhanced chemical vapor deposition (PECVD) has become a more promising way to prepare carbon film since it can lower deposition temperature and accelerate deposition rate.…”

Section: Introductionmentioning

confidence: 99%

Effects of surface oxygen on carbon films synthesized by plasma enhanced chemical vapor deposition

Wang

Chen

et al. 2016

Materials Letters

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Influence of PECVD parameters on the properties of diamond-like carbon films

Cited by 65 publications

References 28 publications

Investigation of the Growth Mechanisms of a-CH_x Coatings Deposited by Pulsed Reactive Magnetron Sputtering

Investigation of the Growth Mechanisms of a-CH_x Coatings Deposited by Pulsed Reactive Magnetron Sputtering

Flame retardant properties of plasma pre-treated/diamond-like carbon (DLC) coated cotton fabrics

Effects of surface oxygen on carbon films synthesized by plasma enhanced chemical vapor deposition

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Influence of PECVD parameters on the properties of diamond-like carbon films

Cited by 65 publications

References 28 publications

Investigation of the Growth Mechanisms of a-CHx Coatings Deposited by Pulsed Reactive Magnetron Sputtering

Investigation of the Growth Mechanisms of a-CHx Coatings Deposited by Pulsed Reactive Magnetron Sputtering

Flame retardant properties of plasma pre-treated/diamond-like carbon (DLC) coated cotton fabrics

Effects of surface oxygen on carbon films synthesized by plasma enhanced chemical vapor deposition

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Product

Resources

About

Investigation of the Growth Mechanisms of a-CH_x Coatings Deposited by Pulsed Reactive Magnetron Sputtering

Investigation of the Growth Mechanisms of a-CH_x Coatings Deposited by Pulsed Reactive Magnetron Sputtering