2010
DOI: 10.1016/j.jallcom.2009.12.143
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Influence of phase transition induced by residual stress on ferroelectric properties of highly (100)-oriented Pb(Zr0.52Ti0.48)O3 thin films

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Cited by 13 publications
(8 citation statements)
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“…In order to optimize the performance of thin films, it is essential to understand those factors that may influence the properties of ferroelectric thin films. Our previous studies have shown that the polarization behavior of polycrystalline PZT thin films greatly depends on preferred orientation, monoclinic phase and associated residual stress [11][12][13]. For example, the 300 nm thick Pb(Zr 0.52 Ti 0.48 )O 3 film exhibits higher remnant polarization value than that of the 200 nm thick PZT film [12].…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…In order to optimize the performance of thin films, it is essential to understand those factors that may influence the properties of ferroelectric thin films. Our previous studies have shown that the polarization behavior of polycrystalline PZT thin films greatly depends on preferred orientation, monoclinic phase and associated residual stress [11][12][13]. For example, the 300 nm thick Pb(Zr 0.52 Ti 0.48 )O 3 film exhibits higher remnant polarization value than that of the 200 nm thick PZT film [12].…”
Section: Introductionmentioning
confidence: 99%
“…Our previous studies have shown that the polarization behavior of polycrystalline PZT thin films greatly depends on preferred orientation, monoclinic phase and associated residual stress [11][12][13]. For example, the 300 nm thick Pb(Zr 0.52 Ti 0.48 )O 3 film exhibits higher remnant polarization value than that of the 200 nm thick PZT film [12]. Especially, it is suggested that residual stress status is tensile for the (1 0 0)-oriented thin films and is compressive for the (1 1 1)-oriented thin films [13].…”
Section: Introductionmentioning
confidence: 99%
“…Lead zirconate titanate (PZT) piezoelectric ceramics exhibit excellent piezoelectric and dielectric properties and are widely applied in numerous electronic devices, such as actuators, sensors, capacitors, resonators, and high-power transducers [1][2][3][4][5][6][7]. On the other hand, PZT ceramics have been extensively modified with different additives, which make them more attractive for specific applications [8][9][10][11][12][13][14].…”
Section: Introductionmentioning
confidence: 99%
“…The room temperature dielectric constants were measured on an Agilent 4294A analyzer. [21]. It is clear that the pure perovskite structure is obtained in the films, which indicates that V 5+ seems to have diffused into the perovskite ABO 3 lattice.…”
Section: Methodsmentioning
confidence: 90%