Influence of phonon, geometry, impurity, and grain size on Copper line resistivity

Plombon, John J.; Andideh, E.; Dubin, Valery M.; Maiz, J.

doi:10.1063/1.2355435

Cited by 134 publications

(95 citation statements)

References 10 publications

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“…The experiment data from Ref. 16 is depicted by "*", and the result of present model is shown by solid line, the result of MS model is shown by dashed line, and the result of Dingle model is shown by dot-dash line. As we have mentioned that R and p are material-dependent parameters and irrelevant to the shape, so we used the R and p values already verified in thin films by the MS model, which keep unchanged for nanowires.…”

Section: Discussionmentioning

confidence: 99%

Conductivity size effect of polycrystalline metal nanowires

Xue

2016

AIP Advances

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It is well known that the conductivity of metal nanowires decreases with the wire diameter. This size effect was first studied for metal thin films when the film thickness approaches the electron mean free path. Fuchs & Sondheimer (FS) pointed out that the external surface scattering of the electrons contributes to the conductivity decrease. Mayadas and Shatzkes (MS) pointed out that the grain boundary scattering plays a major role for polycrystalline thin films. As is clear that nanowires are 2-d constrained instead of 1-d for thin film, so the size effect would be more eminent. However, today the mostly used physical model for the conductivity of metal nanowires is still the MS theory. This paper proposes a more complete model suitable for circular cross-section polycrystalline metal nanowires, which takes into account of background scattering, external surface scattering, as well as grain boundary scattering. Comparison with experiment data showed that our model can well explain the conductivity size effect of polycrystalline metal nanowires.

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Section: Discussionmentioning

confidence: 99%

Conductivity size effect of polycrystalline metal nanowires

Xue

2016

AIP Advances

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“…Also, although surface scattering is expected to be the most important contribution to resistance at dimensions of a few nanometers, the contribution of electron-phonon scattering at finite temperatures cannot be neglected. Plombon et al [6] report a decomposition of the resistance of copper lines with widths ranging from 75 to 500 nm with electron-phonon scattering estimated to account for 60% of the resistivity at a temperature of 300 K. The effects of electron-phonon interactions on resistivity in sub-5-nm copper NWs are currently unknown and have been excluded from this study. It is worth noting that for interconnect applications, these NWs' function would be to provide electrical contact between devices (e.g., transistors) across a short length and with small voltage drops, ideally zero.…”

Section: Methodsmentioning

confidence: 99%

“…It is required that the electrical conductivity of small cross-section copper nanostructures be understood to maintain acceptable power consumption in future nanoelectronics generations. In particular, the contribution of the individual scattering sources, such as surfaces [4], grain boundaries [5], electron-phonon interaction [6], and impurities, to overall resistivity needs to be assessed to aid development of interconnects which minimize line resistance. A succinct overview of these issues can be found in the review of Josell, Brongersma, and Tőkei [7].…”

Section: Introductionmentioning

confidence: 99%

Electron transport properties of sub-3-nm diameter copper nanowires

et al. 2015

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Type of publicationArticle (peer-reviewed) Density functional theory and density functional tight binding are applied to model electron transport in copper nanowires of approximately 1-and 3-nm diameters with varying crystal orientation and surface termination. The copper nanowires studied are found to be metallic irrespective of diameter, crystal orientation, and/or surface termination. Electron transmission is highly dependent on crystal orientation and surface termination. Nanowires oriented along the [110] crystallographic axis consistently exhibit the highest electron transmission while surface oxidized nanowires show significantly reduced electron transmission compared to unterminated nanowires. Transmission per unit area is calculated in each case; for a given crystal orientation we find that this value decreases with diameter for unterminated nanowires but is largely unaffected by diameter in surface oxidized nanowires for the size regime considered. Transmission pathway plots show that transmission is larger at the surface of unterminated nanowires than inside the nanowire and that transmission at the nanowire surface is significantly reduced by surface oxidation. Finally, we present a simple model which explains the transport per unit area dependence on diameter based on transmission pathways results.

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“…For surface contributions, we concentrate on scattering by surface roughness that can account for more than half of the overall resistivity of nanosystems. 5 This assumes that the surface-driven reconstruction of the energy spectrum is less important as it is often the case in good metals. We also disregard the scattering by grain boundaries.…”

Section: Introductionmentioning

confidence: 99%