2000
DOI: 10.1016/s0022-3093(00)00034-x
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Influence of plasma chemistry on the properties of a-(Si,Ge):H alloys

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Cited by 19 publications
(10 citation statements)
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“…The growth chemistry is very important for the quality of the material [35][36][37][38][39][40][41]. A good growth mechanism will result in a better material.…”
Section: Growth Chemistrymentioning
confidence: 99%
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“…The growth chemistry is very important for the quality of the material [35][36][37][38][39][40][41]. A good growth mechanism will result in a better material.…”
Section: Growth Chemistrymentioning
confidence: 99%
“…If we use high hydrogen dilution, then reaction 1 and 4 are predominant and XH3 will be the major radical. Besides, hydrogen has other effects during the growth: passivate the dangling bonds, etch the surface hydrogen, break ihe weaker Si-Si and Ge-Ge bonds (etching during growth) etc [35][36][37][38][39][40][41].…”
Section: Growth Chemistrymentioning
confidence: 99%
“…This system offers unique advantages in being able to dope the electron transporting layer heavily, thereby assuring an ohmic tunnel-junction contact with the transparent conducting layer such as ZnO, and also systematically change the positions of the conduction and valence bands by mixing Si with Ge and C. In general, adding C will tend to move up the conduction band and move down the valence band, increasing the bandgap, 9 whereas adding Ge will primarily move up the valence band and decrease the bandgap. 10 A feature of adding C is that the increase in bandgap allows for less absorption of blue and uv photons in the electron transporting layer. A further significant advantage is that a-Si is almost completely inert to moisture or oxygen ingress, 11 and thereby prevents these atmospheric contaminants from affecting the performance of the solar cell.…”
Section: More Stable Hybrid Organic Solar Cells Deposited On Amorphoumentioning
confidence: 99%
“…The MGP model is used extensively to explain plasma enhanced chemical vapor deposition (PECVD) in literature; however the model doesn't account for the empirical evidence that high quality materials are formed under low pressures with high ion bombardment levels using remote plasma processes [4][5][6]. Ions are always present in plasma discharges, as they are the end product of electrons ionizing the gases present in the plasma zone of the reactor; however there are no ions present in HWCVD processes.…”
Section: 1: Backgroundmentioning
confidence: 99%