Influence of plasma treatment on optical and damage properties of TiO<sub>2</sub> thin films

Si-da, 毛思达 Mao; Yonggang, 邹永刚 Zou; Jie, 范杰 Fan; Yun-ping, 兰云萍 Lan; Haizhu, 王海珠 Wang; Jia-bin, 张家斌 Zhang; Jia-ning, 董家宁 Dong; Xiaohui, 马晓辉 Ma

doi:10.3788/ope.20192707.1451

光学精密工程

2019

DOI: 10.3788/ope.20192707.1451

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Influence of plasma treatment on optical and damage properties of TiO₂ thin films

毛思达 Mao Si-da¹,

邹永刚 Zou Yonggang²,

范杰 Fan Jie³

et al.

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Fabrication of amorphous Al₂O₃ optical film with various refractive index and low surface roughness

Lan¹,

Zou²,

Ma³

et al. 2020

Mater. Res. Express

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Alumina(Al2O3) thin film has been widely used in many applications due to its excellent properties, especially in optical films and semiconductor industries. Refractive index, amorphous property and surface roughness are essential parameters related to its applications. In this study, the fabrication method of preparing various refractive index Al2O3 optical films was proposed. The Al2O3 optical films were deposited at room temperature by electron beam evaporation(EBE) technique. The effects of deposition rate and post-annealed temperature on refractive index, vibration peak of molecular and atom, amorphous property and surface roughness were investigated. Refractive index ranging from 1.519 to 1.627 was realized by EBE method at different deposition rates and different post-annealed temperatures. The variable refractive index was very important in adjusting half-width of reflector band. Meanwhile, analysis showed that the suitable post-annealed temperature could not exceed 400 °C. In short, this work provided an effective approach to fabricate amorphous Al2O3 optical film, which was pretty important in its applications in UV antireflection films and blue light reflection films.

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Fabrication of amorphous Al₂O₃ optical film with various refractive index and low surface roughness

Lan¹,

Zou²,

Ma³

et al. 2020

Mater. Res. Express

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脉冲激光对石英基底Ta2O5/SiO2滤光膜的损伤效应研究

Wang Yunzhe,

Zhang Luwei,

Shao Junfeng

et al. 2023

红外与激光工程

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Influence of plasma treatment on optical and damage properties of TiO₂ thin films

Cited by 2 publications

References 0 publications

Fabrication of amorphous Al₂O₃ optical film with various refractive index and low surface roughness

Fabrication of amorphous Al₂O₃ optical film with various refractive index and low surface roughness

脉冲激光对石英基底Ta2O5/SiO2滤光膜的损伤效应研究

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Influence of plasma treatment on optical and damage properties of TiO2 thin films

Cited by 2 publications

References 0 publications

Fabrication of amorphous Al2O3 optical film with various refractive index and low surface roughness

Fabrication of amorphous Al2O3 optical film with various refractive index and low surface roughness

脉冲激光对石英基底Ta2O5/SiO2滤光膜的损伤效应研究

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Influence of plasma treatment on optical and damage properties of TiO₂ thin films

Fabrication of amorphous Al₂O₃ optical film with various refractive index and low surface roughness

Fabrication of amorphous Al₂O₃ optical film with various refractive index and low surface roughness