Influence of post deposition annealing on crystallinity and dielectric properties of bismuth magnesium niobate thin films

Effects of substrate on the crystalline structure and microwave dielectric properties of Bi1.5Mg1.0Nb1.5O7 sol–gel thin films

“…The There are several potential effects on the crystallinity of the BMN thin films prepared on the different substrates. It is well know that the crystalline structure of the films is related to the deposition conditions, the film stoichiometry, and the mismatch of thermal expansion coefficients (TEC) between film and substrate [10,27,28]. For the BMN thin films directly deposited on the different substrates under identical conditions, the effect of the thermal expansion coefficients of the substrates should be noticed, because it could significantly influence the initial growing process of the films.…”

“…Up to now, a number of works on BMN thin films deposited on various substrates including ITO/glass, Si, and sapphire have been conducted [6][7][8][9][10]. However, most attentions were paid to the influences of deposition conditions on the properties of BMN thin films rather than to the substrate selection.…”