Influence of pre-strain on attributes of Ni-rich NiTi/ Kapton polyimide bimorph for flexible mirrors

Gangwar, Kaushal; Jayachandran, S. Arul; Sahu, Anshu; Singh, Arpit; Palani, I. A.

doi:10.1016/j.sna.2022.113607

Cited by 7 publications

(2 citation statements)

References 29 publications

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“…Laser micromachining employs focused and high-powered laser beams that produce precise and minor features for actuators, electronics, and microelectromechanical systems. The actuator application, such as an optical shutter, requires laser-assisted micromachining of SMA (shape memory alloy) thin film bimorph structure [5,6]. An optical shutter is a device that * Authors to whom any correspondence should be addressed.…”

Section: Introductionmentioning

confidence: 99%

“…Typical optical shutters employ external mechanisms to achieve the desired opening; however, SMA thin film-based optical shutters open and close themselves based on the Joule heating. The two-way actuation property of the SMA bimorph is utilized to achieve the desired opening and closing of the shutter [6]. NiTi SMA bimorph structures have been fabricated in the past studies using deposition techniques such as thermal evaporation, sputtering, and e-beam evaporation [6] [7-9].…”

Section: Introductionmentioning

confidence: 99%

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Investigation of laser-assisted micromachining of NiTi SMA bimorph based actuators toward developing optical shutters

Gangwar,

Pandiyan,

Iyamperumal Anand

2024

J. Micromech. Microeng.

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This work explores laser-assisted micromachining for the precision cutting of NiTi SMA-based bimorph in a single-pass laser scan. NiTi SMA bimorph was fabricated using the e-beam evaporation technique followed by micromachining using a 1064 nm fiber laser. The influence of laser power, laser speed, spot diameter, and laser travel direction on kerf width and heat-affected zone after micromachining was studied using the design of experiments. The optimized parameter for micromachining was at laser power 5 W with 5 mm/s laser speed and 50 μm spot diameter. Various shapes were cut at the optimized parameter, including an optical shutter of a diameter of 30 mm. A laser speed of 6 mm/s has produced microchannels in the bimorph due to NiTi film removal only. The SEM analysis of the shutter reveals the formation of refined grains at micromachined edges compared to the center of the actuator. Fabricated optical shutter shows negligible optical transmittance in the 450 to 700 nm wavelength range.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%