2022
DOI: 10.3390/cryst12020217
|View full text |Cite
|
Sign up to set email alerts
|

Influence of Precursor Density and Conversion Time on the Orientation of Vapor-Deposited ZIF-8

Abstract: ZIF-8 was synthesized by subjecting ZnO thin films deposited via plasma-enhanced atomic layer deposition to a 2-methylimidazole vapor. The impact of the conversion time as well as the density and thickness of the ZnO precursor on the resulting ZIF-8 layers were investigated. Grazing Incidence X-ray diffraction reveals a preferred (100) or (111) orientation of the ZIF-8 crystals, depending on thickness and density of the precursor, and with a more prominent orientation at longer conversion times. The onset of c… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

2
20
2

Year Published

2023
2023
2024
2024

Publication Types

Select...
7

Relationship

2
5

Authors

Journals

citations
Cited by 10 publications
(24 citation statements)
references
References 41 publications
2
20
2
Order By: Relevance
“…This phenomenon can be explained by the increased mobility associated with longer linker exposure times (Figure S5). 22,27,52,53 The large-scale spatial uniformity of the ZIF-8 MLD films was verified by coating a 200 mm Si wafer with minimal thickness variation (29.5 ± 2.4 nm), as determined by ex situ ellipsometry mapping, Figure S6.…”
Section: ■ Direct Zif-8 Mldmentioning
confidence: 96%
“…This phenomenon can be explained by the increased mobility associated with longer linker exposure times (Figure S5). 22,27,52,53 The large-scale spatial uniformity of the ZIF-8 MLD films was verified by coating a 200 mm Si wafer with minimal thickness variation (29.5 ± 2.4 nm), as determined by ex situ ellipsometry mapping, Figure S6.…”
Section: ■ Direct Zif-8 Mldmentioning
confidence: 96%
“…This is in line with previous protocols for the fabrication of thin films bases on different types of MOFs. [49,52]…”
Section: Thin Film Preparationmentioning
confidence: 99%
“…1c), in line with roughness observed in the literature for samples with comparable thickness. 18,35,36 The ZIF-8 formation is further confirmed by in-plane XRD analysis, infrared spectroscopy, XPS and TOF-SIMS. The diffraction peaks observed in the XRD analysis of the as-deposited sample after 10 exposures, ZIF-8@10_exposures , correspond to ZIF-8 sodalite type structure (Fig.…”
Section: Resultsmentioning
confidence: 75%