2010
DOI: 10.1016/j.tsf.2010.01.033
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Influence of residual stress on diffusion-induced bending in bilayered microcantilever sensors

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Cited by 20 publications
(9 citation statements)
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“…The equations are also analogous to equations derived by Xuan et al [56] for deformation of thin sensor films.…”
Section: Bending Model Of Bi-layered Cantilever -Application Of Solidmentioning
confidence: 75%
“…The equations are also analogous to equations derived by Xuan et al [56] for deformation of thin sensor films.…”
Section: Bending Model Of Bi-layered Cantilever -Application Of Solidmentioning
confidence: 75%
“…The concentration of diffusing species is controlled by the residual stress in the coating. The residual stress can either block the pathway of corrosive species (due to compressive behaviour when ∆T > 0) by constricting the aperture of pre-existing micro-cracks or can open the pathway of corrosive species (due to tensile behaviour when ∆T < 0) by exposing/opening the aperture of coating micro-cracks [32,34,35,58]. For the coating substrate system with pre-existing coating micro-cracks, the size of the micro-crack aperture is a linear function of residual stress due to mismatch strain between the coating and substrate and the bending moment introduced by diffusion.…”
Section: Experimental Observationsmentioning
confidence: 99%
“…⍺ c > ⍺ s , the positive temperature diversification (∆T > 0) from its fabrication temperature will induce compressive residual stress in the coating [9,[32][33][34][35]. The pre-exiting micro-cracks in coating will gradually contract with increasing compressive residual stress on temperature rise.…”
Section: Introductionmentioning
confidence: 99%
“…The driving force for diffusing species is the chemical potential of that species, so Equation (2) can now be modified using Maxwell-type relation, derivable from expression of Helmholtz free energy as [47]:…”
Section: Diffusion and Ionic Transport Modelmentioning
confidence: 99%