Influence of RF power and CH4 flow rate on properties of diamond-like carbon films deposited by PECVD technique

Chunjaemsri, Thanun; Chongsereecharoen, Ekachai; Chanlek, Narong; Kidkhunthod, Pinit; Nakajima, Hideki; Tunmee, Sarayut; Yimnirun, Rattikorn; Rujirawat, Saroj

doi:10.1016/j.radphyschem.2020.109073

Cited by 8 publications

(3 citation statements)

References 28 publications

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“…For example, hydrogen has been used as a precursor to modify the surface of semiconductive silicon films for video and computer display applications . Along with that, methane has been used to modify the surface of titanium diamond-like carbon films for applications in metal engineering . In addition, a combination of hexamethyldisiloxane, oxygen, and argon were used to deposit a silicon-oxide layer on the surface of PLA to minimize plastic packaging additives from contaminating food products .…”

Section: Future Outlooks and Conclusionmentioning

confidence: 99%

“…106 Along with that, methane has been used to modify the surface of titanium diamond-like carbon films for applications in metal engineering. 107 In addition, a combination of hexamethyldisiloxane, oxygen, and argon were used to deposit a silicon-oxide layer on the surface of PLA to minimize plastic packaging additives from contaminating food products. 108 these demonstrate advantages over oxygen plasma when used for polymer modification, such as limited competitive etching of the native polymer, as well as the possibility to introduce a wide range of functional groups not possible using oxygen alone.…”

Section: Future Outlooks and Conclusionmentioning

confidence: 99%

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Utilizing Radio Frequency Plasma Treatment to Modify Polymeric Materials for Biomedical Applications

Morelli

Hawker

2021

ACS Biomater. Sci. Eng.

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Studies that utilize radio frequency plasma modification as a strategy to tune the surface properties of polymeric constructs with the goal of enhancing their use as biomedical devices have grown considerably in number over the past decade. In this Review, we present the importance of plasma surface treatment to biomedical applications, including tissue engineering and wound healing. First, we introduce several key polymeric materials of interest for use as biomaterials, including those that are naturally derived and synthetic. We, then, provide an overview of possible outcomes of plasma modification, such as surface activation, etching, and deposition of a thin film, all of which can be used to alter the surface properties of a given polymer. Following this discussion, we review the methods used to characterize plasma-treated polymer surface properties, as well as the techniques used to evaluate their interactions with biological species of interest such as mammalian cells, bacteria, and blood components. To close, we provide a perspective on future outlooks of this exciting and rapidly evolving field.

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Section: Future Outlooks and Conclusionmentioning

confidence: 99%

Section: Future Outlooks and Conclusionmentioning

confidence: 99%

Utilizing Radio Frequency Plasma Treatment to Modify Polymeric Materials for Biomedical Applications

Morelli

Hawker

2021

ACS Biomater. Sci. Eng.

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“…Напротив, алмазоподобная (DLC) фаза характеризуется высокой оптической прозрачностью и устойчивостью к механическим воздействиям [10][11][12]. Проведенные экспериментальные исследования подтвердили чувствительность к температуре наноуглеродных покрытий, полученных методом плазменного осаждения в паровой фазе (PECVD) на поверхности твердотельных подложек [13][14][15][16][17][18].…”

Section: Introductionunclassified

Nanostructured carbon films obtained by CH4 plasma deposition and annealing at high temperature: structural features and their effects on electrical and optoelectronic properties

Prokopev,

Neustroev

2023

jour

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This article is dedicated to the study of the structural, electrical, and optoelectronic properties of nanostructured carbon films obtained by methane plasma deposition, followed by annealing at high temperatures (650–800 °C). The conditions for obtaining the films affected the final physicochemical parameters. We studied the film morphology using atomic force microscopy, scanning electron microscopy, Raman spectroscopy, X-ray energy-dispersive analysis, and analysis of the current voltage (C-V) characteristics. The film thickness ranged from 20 to 150 nm, with a C/O ratio of 4:1. Structural studies have shown that the resulting nanostructured carbon films consist mainly of nanographite flakes, the lateral dimensions of which lie in the lateral size (La) range of 5 to 12 nm, and contain different fractional concentrations of sp3/sp2 crystalline phases of carbon. We have established that with an increase in the annealing temperature, the defectiveness of the carbon film structure increases; however, at the same time, the degree of graphitization increases, as indicated by the Raman spectroscopy data and the calculated values of layer resistances from the C-V characteristics. The values of photocurrents were calculated, from which it was found that the samples exhibited photosensitivity in the temperature range of room temperature to –173 °C, based on the temperature dependences of the C-V. The obtained results can be useful in creating day and night light sensors as well as temperature sensors suitable for use at low temperatures.

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Development of a-C:H coatings doped with trimethylsilyl acetate prepared using plasma enhanced chemical vapor deposition

Kelarová,

Václavik,

Přibyl

et al. 2024

Diamond and Related Materials

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Influence of RF power and CH4 flow rate on properties of diamond-like carbon films deposited by PECVD technique

Cited by 8 publications

References 28 publications

Utilizing Radio Frequency Plasma Treatment to Modify Polymeric Materials for Biomedical Applications

Utilizing Radio Frequency Plasma Treatment to Modify Polymeric Materials for Biomedical Applications

Nanostructured carbon films obtained by CH4 plasma deposition and annealing at high temperature: structural features and their effects on electrical and optoelectronic properties

Development of a-C:H coatings doped with trimethylsilyl acetate prepared using plasma enhanced chemical vapor deposition

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