Influence of Si Surface Preparation on Cosi2 Formation And Agglomeration

Newman, Andréa; Campos, Andréa; Pujol, David Saurí i; Fornara, P.; Gregoire, M.; Mangelinck, Dominique

doi:10.2139/ssrn.4332465

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“…Physical vapor deposition growth processes are very efficient where hills of agglomerated films can be grown through introducing tensile stress 18 – 23 The formation rate of the material agglomeration varies with respect to the dewetting temperature, the initial thickness of the films, strain of the grown NPs, and surface defect states 15 .…”

Section: Introductionmentioning

confidence: 99%

“…Physical vapor deposition growth processes are very efficient where hills of agglomerated films can be grown through introducing tensile stress. [18][19][20][21][22][23] The formation rate of the material agglomeration varies with respect to the dewetting temperature, the initial thickness of the films, strain of the grown NPs, and surface defect states. 15 The choice of the substrate is also an added factor, which influences the growth dynamics, the size and distribution of the formed NPs, their structure, and their shape.…”

Section: Introductionmentioning

confidence: 99%

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Patterning of plasmonic Au nanoparticles on the surfaces of TiOx thin films by solid state thermal dewetting

2023

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It is essential to study the thermal dewetting behavior of as-deposited nano-films for large scale and high-throughput fabrication. We report here on the nucleation of Au nanostructures onto titanium dioxide (TiO x ) thin films surfaces, which occurred in consecutive steps. First, TiO x thin films were grown on quartz substrates reactively by e-beam evaporator and then thermally annealed at different temperatures, starting from 300°C to 900°C. Subsequently, a nano-film of Au was deposited on the top of these TiO x surfaces. The stacked Au∕TiO x samples were post-annealed using muffle furnace at a temperature of 600°C for 1 h, to study the thermal dewetting properties and the controlled growth of the different TiO x morphologies on the formation of Au nanoparticles (NP) and their plasmonic response. Such dual-structures were characterized accordingly to probe their topological, morphological, structural, and optical properties, by means of x-ray photoelectron spectroscopy, scanning electron microscope, atomic force microscopy, and ultra-violet-visible-near infrared characterization techniques. The thermal dewetting properties were found to improve at high temperatures (>500°C), where the Au NP size distribution was found to follow a Gaussian pattern centered around 30 nm. The average surface roughness also increased significantly with respect to the TiO x dewetting temperature, which is mainly attributed to the porosity of the films. Finally, the absorption peak for Au nanostructures has shown a localized surface plasmon resonance close to 520 nm, along with a broad shoulder peak with a strong tail thereby reflecting the wide distribution of the formed Au NP sizes.

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