2018
DOI: 10.5539/mas.v12n10p171
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Influence of Slight Pressure Variations on the Mechanical and Tribological Properties of Ti/TiAlV/TiAlVN Coatings Produced by Magnetron Sputtering

Abstract: Ti/TiAlV/TiAlV(N) coatings were deposited by D.C magnetron sputtering technique. This experiment was carried out on 316L stainless steel substrates, and it was produced varying the working pressure, in an environment composed by a mixture of Ar/N2. While Ti and TiAlV layers were produced at a constant pressure, TiAlV(N) layers were grown at 0.6, 0.8, 0.9 and 1.0 Pa, for samples M1, M2, M3 and M4, respectively. After the production, morphological, compositional and structural properties of coatings were studied… Show more

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