2023
DOI: 10.1088/1361-6463/ace83a
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Influence of soft x-ray and ultraviolet irradiations on sensitivity of sensors made with piezoelectret films

Abstract: Piezo/ferroelectrets are a kind of cellular electret materials exhibiting piezoelectric effect. Owing to their large piezoelectric activity, flexibility, lightweight, low cost and large area, a list of promising applications have been suggested, including wearable sensors, actuators, micro energy harvesters, and etc. In terms of actual application, one of the most important performance indexes is the stability of piezoelectric response in complex application environments. This article mainly focuses on the inf… Show more

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Cited by 2 publications
(3 citation statements)
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“…On this layer, a 30 nm thick fluorine-doped tin oxide (SnO2) layer (3) is positioned, with which an ohmic nickel contact (4) up to 1 µm thick is attached. On the reverse side of the crystal, an ohmic common contact layer, also made of nickel (5), up to 1 µm thick, is formed. As shown in Fig.…”
Section: Device Descriptionmentioning
confidence: 99%
“…On this layer, a 30 nm thick fluorine-doped tin oxide (SnO2) layer (3) is positioned, with which an ohmic nickel contact (4) up to 1 µm thick is attached. On the reverse side of the crystal, an ohmic common contact layer, also made of nickel (5), up to 1 µm thick, is formed. As shown in Fig.…”
Section: Device Descriptionmentioning
confidence: 99%
“…A range of ferroelectrets that are based on cellularfoam polypropylene (PP) [13,14], polyethylene (PE) [15,16], cyclo-olefin copolymers (COCs) [17], polycarbonate (PC) [14], fluoroethylenepropylene (FEP) copolymers [18,19], sandwiched FEP films or porous polytetrafluoroethylene (PTFE), etc [20], have been developed. There are three main types of internal porous structures following from different fabrication processes: (1) closed lens-shaped pores, as in PP [13], PE [15] and FEP [14] ferroelectrets can be generated by inflating the respective polymer under high-pressure nitrogen or carbon-dioxide gas before heat treatment; charges of opposite polarity are trapped on opposite inner surfaces after poling.…”
Section: Introductionmentioning
confidence: 99%
“…(2) Artificial cavities can be designed to act as macropores after being charged, e.g. parallel channels in FEP ferroelectrets prepared around templates [18,19], COC ferroelectrets with laser-cut rectangular channel arrays [17]. More recently, 3D printing has become another promising way to prepare ferroelectrets with artificial cavities [21,22].…”
Section: Introductionmentioning
confidence: 99%