2013
DOI: 10.4028/www.scientific.net/kem.537.307
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Influence of Sputtering Power on the Structure and Mechanical Properties of Zr-Nb-N Nanocomposite Coatings Prepared by Multi-Target Magnetron Co-Sputtering

Abstract: Ternary Zr-Nb-N nanocomposite coatings were synthesized on Si(100) substrates by Multi-target Magnetron Co-sputtering. The structure and chemical composition and binding energy of coatings were characterized by X-ray diffractometry (XRD) and Energy-dispersive X-ray spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS). The results of measurements of Nano Indenter indicated that the maximum hardness was up to 36 GPa and elastic modulus was close to 425 GPa at the 30 W of Zr power and 120 W of NbN power.… Show more

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Cited by 8 publications
(3 citation statements)
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“…Multicomponent coatings based on nitrides of metals such as Ti, Al, Cr, Mo, Nb, and Zr were analyzed in a large number of studies. In particular, a number of studies have focused on the properties of the (Zr,Nb)N coating, in which a cubic fcc-(Zr,Nb)N mixed crystal phase has been detected as the dominant one [35][36][37][38]. The (Ti,Zr)N coating has also been investigated in a number of papers [39][40][41][42][43][44][45][46][47].…”
Section: Introductionmentioning
confidence: 99%
“…Multicomponent coatings based on nitrides of metals such as Ti, Al, Cr, Mo, Nb, and Zr were analyzed in a large number of studies. In particular, a number of studies have focused on the properties of the (Zr,Nb)N coating, in which a cubic fcc-(Zr,Nb)N mixed crystal phase has been detected as the dominant one [35][36][37][38]. The (Ti,Zr)N coating has also been investigated in a number of papers [39][40][41][42][43][44][45][46][47].…”
Section: Introductionmentioning
confidence: 99%
“…At present, the most of the coatings widely used in industrial sphere are based on the TiN and (Ti,Al)N systems, as a rule, with the inclusion of additional elements, such as Cr, Mo, Y, Gf, Si, and others for the improvement of hardness, wear resistance, and heat resistance, which is very important [1][2][3][4][5][6][7][8][9][10]. Taking into account the fact that an enhancement of the cutting efficiency is an essential task of the modern manufacturing, while an increase in the cutting speed is a prevailing way to enhance the efficiency, the heat resistance is becoming an increasingly important property.…”
Section: Introductionmentioning
confidence: 99%
“…These lacks can be improved usually by deposing TiN, (Ti, Al)N, and (Ti, Nb)N hard films on the cutting tool surfaces. In order to further improve the comprehensive performances, hard reaction films has been developing toward multiple component films, multilayer composite films, gradient composition films [1,2].…”
Section: Introductionmentioning
confidence: 99%