2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics 2010
DOI: 10.1109/aim.2010.5695900
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Influence of stiffness change due to mass loading on resonant microcantilever mass sensor's performance

Abstract: Capability of piezoelectric microcantilever mass sensors to detect very small amount of mass, such as detection of a single virus has attracted many researchers' interests. In many cases, detection of mass is performed by adsorbing of materials in porous matrixes on the sensor surface, in which the adsorbed material does not form a solid layer on the cantilever surface. On the other hand, there are materials such as gold and mercury that constitute a solid layer on cantilever surface. The thickness and the you… Show more

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