Influence of substrate material on the initial thin film growth during ion deposition from a glow discharge

Berg, Sören; Gelin, B; Svärdström, Anders; Babulanam, S. M.

doi:10.1016/0042-207x(84)90180-5

Cited by 8 publications

(5 citation statements)

References 3 publications

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“…Certainly, the conditions in TS are very different from the conditions in the experiments reported in [13][14][15], where those data were obtained, and materials of mirror samples also differed from the samples of experiments reported in [13,14]. However, for us it is important that the sticking probability of the carbon-containing deposit may be different for different materials, i.e.…”

Section: Discussioncontrasting

confidence: 52%

“…They demonstrated that in similar experimental conditions of a discharge in a CH 4 + Ar mixture, the thicknesses of deposited carbon film were different, decreasing along the substrate raw silicon, platinum, aluminium and zirconium. For this, the differences between the pair silicon and platinum on the one hand and the pair aluminium and zirconium on the other hand were much less than the difference between the pair platinum and aluminium (see figure 3 in [14]). Berg et al did not discuss the reason for the differences in the sticking coefficients of the substrates that they investigated (e.g.…”

Section: Discussionmentioning

confidence: 93%

“…For the first time the idea about the role of sticking coefficients of a substrate in the growth of a carbon film was published by Berg et al [14]. They demonstrated that in similar experimental conditions of a discharge in a CH 4 + Ar mixture, the thicknesses of deposited carbon film were different, decreasing along the substrate raw silicon, platinum, aluminium and zirconium.…”

Section: Discussionmentioning

confidence: 96%

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Interpretation of Tore Supra in-vessel mirror experiments

Voitsenya

Bardamid

Belyaeva

et al. 2008

Plasma Devices and Operations

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In this paper the results of post-mortem analysis of mirror samples (molybdenum, stainless steel and copper) exposed for the 1 year experimental campaign inside the Tore Supra tokamak are presented. The mirrors were not protected during the experiment and therefore were exposed both to glow discharge conditioning of the vessel walls and to working discharges. After exposure, all samples were found to be eroded and at the same time were coated with a thin contaminating deposit. We pay attention to the fact, that the observed erosion cannot be described using the published sputtering yields. In particular, the difference between the erosion of stainless steel and copper exceeded a factor of 10 and the difference between the erosion of stainless steel and molybdenum was less than a factor of 2 in comparison with the corresponding factors of approximately 2.5 and apprximately 10 known from the literature. An attempt is made to correlate these observations with the different sticking coefficients of carbon on to different substrates.

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Section: Discussioncontrasting

confidence: 52%

Section: Discussionmentioning

confidence: 93%

Section: Discussionmentioning

confidence: 96%

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Interpretation of Tore Supra in-vessel mirror experiments

Voitsenya

Bardamid

Belyaeva

et al. 2008

Plasma Devices and Operations

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“…162 The roughness of DLC films has been shown to depend on the various deposition methods 163,164 and deposition parameters such as ion energy, [165][166][167][168][169][170] gas mixture 163 and bias voltage. 169 Coating roughness is also dependent on substrate material [171][172][173] and the underlying substrate roughness. Increasing the substrate temperature during deposition results in a higher proportion of sp 2 bonding, creating a more graphitic and therefore rougher surface.…”

Section: Film Roughnessmentioning

confidence: 99%

Diamond like carbon coatings for tribology: production techniques, characterisation methods and applications

Hainsworth¹,

Uhure²

2007

International Materials Reviews

184

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There are numerous types of surface coatings available to engineers in order to improve the friction and wear resistance of components. In order to successfully use these coatings in practice, it is important to understand the different types of coatings available, and the factors that control their mechanical and tribological properties. This paper will focus on the application of diamond-like carbon (DLC) coatings in tribological applications. Thus far, DLC coatings have found broad industrial application, particularly in optical and electronic areas. In tribological applications, DLC coatings are now being used successfully as coatings for ball bearings where they decrease the friction coefficient between the ball and race, in shaving applications where they increase the life of razor blades in wet shaving applications, and increasingly in automotive applications such as racing engines and standard production vehicles.The structure and mechanical properties of DLC coatings are dependent on the deposition method and the incorporation of additional elements such as nitrogen, hydrogen, silicon and metal dopants. These additional elements control the hardness of the resultant film, the level of residual stress and the tribological properties. As diamond-like carbon films increasingly become adopted for use in industry, it is important to review the factors that control their 2 of 42 DLC Reviewproperties, and thus, the ultimate performance of these coated components in practical tribological applications.

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“…Selective deposition of a metal film has been demonstrated by using rf-bias sputtering in an argon atmosphere [186,187]. The substrate bias etching rate is set approximately equal to the deposition rate.…”

Section: Emerging Technologiesmentioning

confidence: 99%

Sputter Deposition Processes

Parsons

1991

Thin Film Processes

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Influence of substrate material on the initial thin film growth during ion deposition from a glow discharge

Cited by 8 publications

References 3 publications

Interpretation of Tore Supra in-vessel mirror experiments

Interpretation of Tore Supra in-vessel mirror experiments

Diamond like carbon coatings for tribology: production techniques, characterisation methods and applications

Sputter Deposition Processes

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