2015
DOI: 10.1016/j.jmmm.2015.02.021
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Influence of substrate temperature on structure, microstructure and magnetic properties of sputtered Fe–Ga thin films

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Cited by 42 publications
(16 citation statements)
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“…12,13 The film composition was estimated to be Gd 19 Fe 81 . The disparity in composition between the target and the film occurs due to the difference in vapor pressure at melting point for Fe and Gd.…”
Section: Resultsmentioning
confidence: 99%
“…12,13 The film composition was estimated to be Gd 19 Fe 81 . The disparity in composition between the target and the film occurs due to the difference in vapor pressure at melting point for Fe and Gd.…”
Section: Resultsmentioning
confidence: 99%
“…Meanwhile, the size and surface roughness of the catalyst film increased with the thickness of the film. For the film with larger thickness, a longer deposition time during the magnetron sputtering process results in the increment in substrate temperature and nucleation rate, which leads to a larger particle size on the surface of the catalyst film [13]. Further, the melting point of the alloy is generally lower than that of the single metal, so the particle size and surface roughness of the Cu-Cr catalyst film is bigger than that of the Cu catalyst film, as shown in Figure 1c Figure 2 shows SEM images of different CNSs after C2H2/H2-CVD, where the inserts are the SEM images of the corresponding catalyst films annealed in a H2 atmosphere.…”
Section: Methodsmentioning
confidence: 99%
“…So, Fe 100-x Ga x films are the suitable candidate of other magnetostrictive materials, e.g., Terfenol-D and Fe-Ga alloy, because of its superior synthetic properties [4]. Fe 100-x Ga x films for microsensor and microactuator development are possible [5].…”
Section: Introductionmentioning
confidence: 99%
“…This is beneficial to improve the performance of thin films. Basumatary et al report the microstructure and magnetic properties of Fe 100-x Ga x films deposited at different deposited temperatures [5]. The grain size and surface roughness increase with the increasing of substrate temperature.…”
Section: Introductionmentioning
confidence: 99%