Influence of TEOS/Si&lt;inf&gt;3&lt;/inf&gt;N&lt;inf&gt;4&lt;/inf&gt; passivation layer on the performance of MOSFET/ISFET structure

Noh, Nurul Izzati Mohammad; Yusof, Khairul Aimi; Abdullah, Ali Zaini; Herman, Sukreen Hana; Abdullah, Wan Fazlida Hanim

doi:10.1109/icsgrc.2013.6653291

2013 IEEE 4th Control and System Graduate Research Colloquium 2013

DOI: 10.1109/icsgrc.2013.6653291

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Influence of TEOS/Si<inf>3</inf>N<inf>4</inf> passivation layer on the performance of MOSFET/ISFET structure

Nurul Izzati Mohammad Noh

Khairul Aimi Yusof

Ali Zaini Abdullah

et al.

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Influence of TEOS/Si<inf>3</inf>N<inf>4</inf> passivation layer on the performance of MOSFET/ISFET structure

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References 16 publications

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