other applications. In 1994, J. J. Rocca et al. reported the first demonstration of large soft X-ray amplification in the plasma of a capillary discharge [1]. A population inversion between 2p 5 3p 1 S 0 and 2p 5 3s 1 P 1 (J = 0-1) in the Ne-like Ar ions was produced by the electron collisional excitation, and the gain coefficient at 46.9 nm (A line) was measured as 0.6 cm −1 . A saturated Ne-like Ar soft X-ray laser at 46.9 nm pumped by capillary discharge has produced millijoule-level laser pulses at a repetition rate of 4 Hz [2] and has led to many applications such as the diagnostics of dense plasma [3], lithography [4], nanoimaging [5], nanomachining [6] and material ablation [7].Other groups also had developed 46.9 nm laser pumped by capillary discharge [8][9][10][11][12][13][14][15][16]. Some groups studied the 46.9 nm laser with a low current, which is benefit to reduce the size and enhance the repetitive frequency of the laser. G. Niimi et al. firstly reported the observation of 46.9 nm laser output at a low discharge current of 9 kA [8]. G. Tomassetti et al. reported that 46.9 nm laser was realized with low amplitude 17-20 kA current pulses at pulse repetition rate up to 0.1 Hz [9]. The saturated laser at 46.9 nm was achieved by C. A. Tan et al. using the main current as low as 16 kA [13]. However, the other Ne-like Ar lasers were not observed by these groups.Except for J = 0-1 transition at 46.9 nm, EUV lasers can also be expected on some other 3p-3s transitions of Ne-like Ar in principle. The populations and gain coefficients of the 3p-3s transitions in Ne-like Ar were investigated by D. E. Kim et al. in theory [17]. It was found that large gains on the 3p 1 S 0 -3s 1 P 1 (J = 0-1), 3p 3 P 2 -3s 1 P 1 (J = 2-1) and 3p 3 D 2 -3s 3 P 1 (J = 2-1) transitions were formed for the electron density between 10 18 and 10 19 cm −3 . Due to the observation of intense laser on 3p 1 S 0 -3s 1 P 1 (J = 0-1) transition at 46.9 nm (A line), the two other lasers on 3p 3 P 2 -3s 1 P 1 (J = 2-1) transition at 69.8 nm (C line) and 3pAbstract We report the characteristics of 46.9, 69.8 and 72.6 nm lasers of Ne-like Ar in a plasma column pumped by capillary discharge. A main current of 12 kA with rise time of 40 ns was used to generate the plasma in a 35-cmlong capillary. The temporal and spatial characteristics of 46.9 and 69.8 nm laser pulses were measured. The time of lasing onset for the two lasers is about 35 ns. The pulse widths are about 1.3 ns for 46.9 nm laser and 1.2 ns for 69.8 nm laser. The FWHM beam divergences of the 46.9 and 69.8 nm lasers are approximately 0.5 and 0.4 mrad, respectively. The initial pressure ranges for 46.9, 69.8 and 72.6 nm lasers correspond to 13-24, 12.5-20 and 14-20 Pa, respectively. A gain coefficient of 0.58 cm −1 was measured and gain saturation behavior was observed at 46.9 nm, conditioning the initial pressure of 19 Pa. At the same discharge current, a 69.8 nm laser with gain coefficient of 0.41 cm −1 and a 72.6 nm laser with gain coefficient of 0.22 cm −1 were achieved by changing...