2008
DOI: 10.1002/ppap.200700068
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Influence of the Gas Humidity on the Uniformity of RF‐Powered Atmospheric‐Pressure Low‐Temperature DBD Plasmas

Abstract: The effect of the water level in a He working gas on the uniformity of the atmospheric pressure plasmas was investigated using emission spectroscopy. The 13.56 MHz rf‐powered dielectric barrier discharges were generated using He gas, in which water vapor of various concentrations was added. Electron density of the discharge medium determined using the emission spectra clearly demonstrated that the humidity level affects the electron density and the uniformity of the plasma.

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Cited by 15 publications
(16 citation statements)
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“…At lower actuator voltages, this transition is gradual but it is more sudden at the highest voltages like the 50 kV case. Koo et al [9] investigated the effect of moisture content on the spatial uniformity of a 13.56 MHz RFpowered dielectric barrier discharge using helium gas. Their study showed that, as the moisture content increased, the character of the discharge changed from uniform glow to streak discharge which is consistent with the results shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…At lower actuator voltages, this transition is gradual but it is more sudden at the highest voltages like the 50 kV case. Koo et al [9] investigated the effect of moisture content on the spatial uniformity of a 13.56 MHz RFpowered dielectric barrier discharge using helium gas. Their study showed that, as the moisture content increased, the character of the discharge changed from uniform glow to streak discharge which is consistent with the results shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…and experiment [52,53] . The mechanism behind n e reduction in the solution surface is supposed to be as a result of the enhanced process of electron-ion recombination [52,54] .…”
Section: F I G U R Ementioning
confidence: 99%
“…Increased attachment and reduced power coupling to the electrons lead to the decrease of the electron density as the oxygen concentration in the background gas and the discharge electronegativity increase. 43 As discussed earlier, in HeþO 2 plasmas the generation of ROS requires energetic electrons to initiate the reactions that lead to the formation of O and other reactive species (see Fig. 4(b)).…”
Section: -mentioning
confidence: 99%