Influence of the nitrogen pressure on the structure and properties of (Ti,Al)N coatings deposited by cathodic vacuum arc PVD process

Bujak, J.; Walkowicz, J.; Kusiński, J.

doi:10.1016/j.surfcoat.2003.10.058

Cited by 74 publications

(42 citation statements)

References 17 publications

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“…%. This understoichiometry is commonly observed in Ti-Al-N thin films, 1,35,36 and DFT calculations indicate that the formation of nitrogen vacancies is not only energetically favourable, but also that the calculated lattice parameters and elastic properties are consistent with experimental data. 27 Hence, the here obtained stress-free lattice parameter of the concentration.…”

Section: Resultssupporting

confidence: 75%

“…Stress-free lattice parameters were obtained according to the method of Genzel for h001i textured cubic crystals 24 from XRD analysis in a Bruker AXS D8 Discover General Area Diffraction Detection System. (111), (200), and (220) lattice planes were measured in Bragg-Brentano geometry at sample tilting angles of 36 , 0 , and 45 respective to the surface normal. Under this condition, the strain e hkl can be determined by 24 e hkl ¼ 2s 12 …”

Section: Methodsmentioning

confidence: 99%

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Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering

Hans

Baben

Mušić

et al. 2014

Journal of Applied Physics

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Ti-Al-O-N coatings were synthesized by cathodic arc and high power pulsed magnetron sputtering. The chemical composition of the coatings was determined by means of elastic recoil detection analysis and energy dispersive X-ray spectroscopy. The effect of oxygen incorporation on the stress-free lattice parameters and Young's moduli of Ti-Al-O-N coatings was investigated by X-ray diffraction and nanoindentation, respectively. As nitrogen is substituted by oxygen, implications for the charge balance may be expected. A reduction in equilibrium volume with increasing O concentration is identified by X-ray diffraction and density functional theory calculations of Ti-Al-O-N supercells reveal the concomitant formation of metal vacancies. Hence, the oxygen incorporation-induced formation of metal vacancies enables charge balancing. Furthermore, nanoindentation experiments reveal a decrease in elastic modulus with increasing O concentration. Based on ab initio data, two causes can be identified for this: First, the metal vacancy-induced reduction in elasticity; and second, the formation of, compared to the corresponding metal nitride bonds, relatively weak Ti-O and Al-O bonds. V C 2014 AIP Publishing LLC.

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Section: Resultssupporting

confidence: 75%

Section: Methodsmentioning

confidence: 99%

Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering

Hans

Baben

Mušić

et al. 2014

Journal of Applied Physics

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“…A Ti 50 Al 50 (99.8%) alloy cathode (diameter: 8 cm) was used in Ti-Al-Si-N coatings. The area of the Si UBM source was 400 cm 2 and placed next to the outlet of the plasma duct. The UBM power was released as a 20 kHz asymmetric pulse.…”

Section: System Configuration For Nanocomposite Films Depositionmentioning

confidence: 99%

“…However, the substitution of TiN has been required because of its low oxidation temperature of 500 o C. From 1970s, it was revealed that nanocomposite films have their infinite probability enough to replace the previous materials such as TiN. Nanocomposite materials such as nanocrystalline TiN/Si 3 N 4 , TiN/TiC/Si 3 N 4 , and TiN/AlN/Si 3 N 4 exhibited superior oxidation temperature (~1000 o C) as well as ultra hardness (45)(46)(47)(48)(49)(50)(51)(52)(53)(54)(55) [1][2][3][4][5][6]. Many deposition tools like a magnetron sputtering, plasma enhanced chemical vapor deposition (PECVD), arc ion plating (AIP), and filtered vacuum arc (FVA) were introduced for synthesizing nanocomposite films.…”

Section: Introductionmentioning

confidence: 99%

Nanocomposite Films Deposition by means of Various Filtered Vacuum Arc Systems

Lee¹,

Kim²,

Svadkovski³

et al. 2011

Advances in Diverse Industrial Applications of Nanocomposites

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“…The tribological properties of single-layer and multi-layer TiN coatings were extensively studied in the literature and published in a handbook. [1][2][3][4][5][6][7][8] On the other hand, the corrosion of TiN in tribological applications was often overlooked, mainly due to the shorter life time of the cutting tools. TiN, with its golden colors, has been used for decorative applications, such as watches, architectural materials and ornaments.…”

Section: Introductionmentioning

confidence: 99%

Pitting corrosion of TiN-coated stainless steel in 3 % NaCl solution

Küçük¹,

Sarıoğlu²

2015

Mater. Tehnol.

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TiN coatings deposited by arc PVD were characterized by XRD and SEM. In-situ measurements of the corrosion of the substrate and the TiN-coated substrate were made using the corrosion potential (Cor.Pot.), the polarization resistance (PR) method and electrochemical impedance spectroscopy (EIS) in a 3 % NaCl solution as a function of the immersion time. The semiconductor scale formed on the TiN was identified using a Mott-Shottky analysis as an n-type semiconductor with a flat band potential of -0.83 V vs. SCE. The TiN coating (0.5 μm thick) consisted of cubic TiN exhibiting columnar grains, pin holes, voids and porosities. The pitting corrosion of the TiN, observed visually between 1 h and 2 h, was captured by EIS and PR. The electrical circuit (EC) model used for the EIS data supported the degradation of the coating through pitting corrosion, in agreement with the visual observations. The corrosion resistance (polarization resistance) determined by the polarization resistance method (Rp) and the EIS (Rtotal) decreased suddenly during the pitting corrosion. The corrosion resistance of the TiN-coated substrate was greater than the corrosion resistance of the substrate during the approximately 24 h of exposure. Keywords: stainless steel, TiN, coating, EIS, polarization resistance, pitting corrosion Prevleka TiN, nanesena z oblo~nim PVD-postopkom, je bila pregledana z XRD in SEM. In-situ meritve korozije podlage in podlage s prevleko iz TiN so bile izvr{ene z metodo korozijskega potenciala (Cor.Pot.), polarizacijske upornosti (PR) in z elektrokemijsko impedan~no spektroskopijo (EIS) v 3-odstotni raztopini NaCl v odvisnosti od~asa namakanja. Mott-Shottkyjeva analiza je odkrila nastanek n-tipa polprevodne {kaje na TiN s potencialom ravnih nivojev -0.83 V proti SCE. Prevleko TiN (debeline 0,5 μm) sestavljajo kubi~ni TiN s stebrastimi zrni, luknjami, prazninami in poroznostjo. Vidno odkrita jami~asta korozija TiN, opa`ena med 1 h in 2 h, je bila posneta z EIS in PR. Model elektri~nega tokokroga (EC), ki je bil uporabljen za EIS-podatke, podpira degradacijo prevleke z jami~asto korozijo, skladno z vizualnimi opa`anji. Korozijska upornost (polarizacijska upornost), dolo~ena z metodo polarizacijske upornosti (Rp) in EIS (Rtotal) se je nenadno zmanj{ala med jami~asto korozijo. Korozijska upornost podlage z nanosom TiN je bila ve~ja kot korozijska obstojnost podlage med izpostavitvijo okrog 24 h.

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Influence of the nitrogen pressure on the structure and properties of (Ti,Al)N coatings deposited by cathodic vacuum arc PVD process

Cited by 74 publications

References 17 publications

Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering

Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering

Nanocomposite Films Deposition by means of Various Filtered Vacuum Arc Systems

Pitting corrosion of TiN-coated stainless steel in 3 % NaCl solution

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