Influence of the side etching effect in DRIE on performance of electrostatic linear comb-drive actuators

Influence of the driving frequency and equivalent parameters on displacement amplitude of electrostatic linear comb actuator

“…Material properties of the silicon [4,10] and air are listed in Table 2: The conversion coefficients in differential equation ( 4) calculated by equations ( 2), ( 7) and ( 11) are shown in Table 3: The ELCA's simulation is implemented by using a finite element method (FEM) in ANSYS. At driving voltage of 100V, the maximum stress on suspension beams is 28.2MPa and the obtained displacement y of the shuttle is 38.42µm, as shown in Fig.…”

“…The total stiffness in y-direction of four suspension beams system can be calculated as [4,10]: While applying a voltage V between anchor pads 2 and fixed electrodes 3 of the ELCA, the total electrostatic force in y-direction is expressed as follows…”

“…where n is a total number of the movable comb fingers; ε 0 = 8.854×10 −6 pF/µm and ε = 1 are permittivity of vacuum and air, respectively; V is the driving voltage. The total stiffness in y-direction of four suspension beams system can be calculated as [4,10]…”

“…The authors in [9] have proposed a structure of an actuator by adding a module which combines of a sensor and a sub-actuator for controlling and minimizing instability. The influence of side etching effect on displacement of the ELCA after deep-Reactive ion etching (D-RIE) process has been mentioned particularly by [10].…”

“…When calculating the displacement of the ELCA in design task [3,4,[10][11][12], the authors used the theoretical formula which is established based on static equilibrium equation, aiming simplifies computing and reduces a design time. In fact, these devices work in state of motion though applying AC voltage likes a square or sine wave, etc.…”