Demand for high-performance energy storage devices is
growing tremendously.
Supercapacitors possess an excellent candidature to fulfill the energy
storage requisites such as high energy density when compared to conventional
capacitors, high power density, and cycling stability as compared
to batteries, though not only for large-scale devices for higher energy/power
density applications but also for macro- to microdevices for miniaturized
electrical components. With the aid of various routes, many materials
have been explored with well-tuned properties with controlled surface
architecture through various preparative parameters to find those
best suited for supercapacitive electrodes. Growth of a thin film
can be accomplished through chemical or physical (vacuum-assisted)
routes. Vacuum-assisted (physical) growth yields high purity, precise
dimensions with a line-of-sight deposition, along with high adhesion
between the film and the substrates, and hence, these techniques are
necessary to manufacture many macro- to microscale supercapacitor
devices. Still, much effort has not been put forth to explore vacuum-assisted
techniques to fabricate supercapacitive electrodes and energy storage
applications. The present review explores the first comprehensive
report on the growth of widespread materials through vacuum-assisted
physical deposition techniques inclusive of thermal evaporation, e-beam
evaporation, sputtering, and laser beam ablation toward supercapacitive
energy storage applications on one platform. The theoretical background
of nucleation and growth through physical deposition, optimization
of process parameters, and characterization to supercapacitor applications
from macro- to microscale devices has been well explored to a provide
critical analysis with literature-reviewed materials. The review ends
with future challenges to bring out upcoming prospects to further
enhance supercapacitive performance, as much work and materials need
to be explored through these routes.