2003
DOI: 10.1016/s0257-8972(03)00328-1
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Influence of Ti addition on the properties of W–Ti–C/N sputtered films

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Cited by 49 publications
(22 citation statements)
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“…Similar evolution of the structure as a function of the N content was found in industrially deposited films in relation to those deposited by Cavaleiro et al (2003) and Silva et al (2005) in laboratory equipment. As in these works, Fig.…”
Section: Chemical Composition and Structuresupporting
confidence: 71%
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“…Similar evolution of the structure as a function of the N content was found in industrially deposited films in relation to those deposited by Cavaleiro et al (2003) and Silva et al (2005) in laboratory equipment. As in these works, Fig.…”
Section: Chemical Composition and Structuresupporting
confidence: 71%
“…The chemical composition of the coatings produced in the laboratory equipment was extensively reported previously by Cavaleiro et al (2003) and Silva et al (2005Silva et al ( , 2008. Films with N content from 0 up to 55 at.% were deposited.…”
Section: Chemical Composition and Structurementioning
confidence: 99%
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“…In experiments, the hardness of a thin film is measured from indentation tests, in which different factors affect the result, such as texture, average grain size, stoichiometry, and lattice mismatch between film and substrate materials. While the addition of a second transition metal has indeed often been connected to hardness enhancements in B1-TiMN [4][5][6][7], these findings may be due to film microstructure features Table 1. Present work DFT estimations of elastic properties for binary and ternary nitrides.…”
Section: Resultsmentioning
confidence: 99%
“…To develop thin film nitride alloys with suitable mechanical and physical properties, material chemical composition can be tuned, and growth and processing parameters optimized, to control stoichiometry, microstructure, and texture. For protective coatings, high hardness is obviously a very sought after characteristic [4][5][6][7][8], as it prevents the surface from being scratched and worn at extreme working pressures. Typically, hardness enhancement is achieved by hindering the dislocations mobility, and hence reducing the plastic deformations in a material [9,10].…”
Section: Introductionmentioning
confidence: 99%