2014
DOI: 10.7498/aps.63.167701
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Influence of vacancy on spontaneous polarization of wurtzite AlN: a maximally localized Wannierfunction study

Abstract: By using first-principles plane-wave ultrasoft pseudopotential method based on the density functional theory, the maximally localized Wannier functions of N vacancy and Al vacancy with different charge states in wurtzite AlN are calculated. With the shape and center of the computed Wannier function, the electronic structure and the spontaneous polarization of vacancy are studied respectively. The results show that N–Al bond possesses a large ionicity. It is found that the electrons of the dangling bonds displa… Show more

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“…With the development of semiconductor technology, the excellent radio frequency (RF) characteristic of high-resistance silicon (HR-Si) is gradually discovered. It is shown that AlN films deposited directly on HR-Si have large RF losses, which is due to the large lattice mismatch and thermal mismatch between AlN and HR-Si, as well as the introduction of unintentional doping during the growth process [ 4 , 5 ]. It results in a large number of point defects in AlN materials, including Al vacancies and N vacancies which will form impurity scattering centers in the material and reduce carrier mobility and device performance while reducing its service life [ 6 , 7 , 8 ].…”
Section: Introductionmentioning
confidence: 99%
“…With the development of semiconductor technology, the excellent radio frequency (RF) characteristic of high-resistance silicon (HR-Si) is gradually discovered. It is shown that AlN films deposited directly on HR-Si have large RF losses, which is due to the large lattice mismatch and thermal mismatch between AlN and HR-Si, as well as the introduction of unintentional doping during the growth process [ 4 , 5 ]. It results in a large number of point defects in AlN materials, including Al vacancies and N vacancies which will form impurity scattering centers in the material and reduce carrier mobility and device performance while reducing its service life [ 6 , 7 , 8 ].…”
Section: Introductionmentioning
confidence: 99%