Influence on Mechanical Characteristics of Thickness of Layers in MoN/CrN Multilayer Coatings, Deposited Under the Influence of Negative Bias Potential

Beresnev, V. M.; Sоbоl, O. V.; Stolbovoy, А. V.; Lytovchenko, S. V.; Kolesnikov, D. A.; Nyemchenko, U. S.; Meylehov, А. А.; Postelnyk, А. А.

doi:10.21272/jnep.8(1).01043

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“…The unique properties and structural states MoN coating in the form of single-layer coatings [24,25], and in multilayer compositions [26][27][28][29][30] in the first instance determined by the possibility fibrewise strain relief [24], which is a very important parameter in the formation of a multilayer composition. On the other hand, in recent years an enhanced interest has been shown by coatings based on ZrN [31], which is largely due to the high resistance of such coatings to oxidation and radiation resistance.…”

Section: Introductionmentioning

confidence: 99%

Structural Engineering Multiperiod Coating ZrN/MoN

Sоbоl¹,

Meylekhov²,

Stolbovoy³

et al. 2016

J. Nano- Electron. Phys.

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Using the method of structural engineering by changing the thickness of the layers in a multiperiod ZrN/MoN system investigated the effect of the phase-texture state of the crystallites and their size on the hardness of the vacuum-arc coating. Is revealed a determining influence on the formation of ZrN layers preferential orientation growth [100] axis with a small layer thickness 7-20 nm (the deposition of 3 to 10 seconds). At high layer thickness determines the texture [311] crystallites are -Mo2N phase formed in the Mo-N layers. Pulsed high-voltage stimulation without changing the type of structural states for different layer thicknesses, leads to partial disorientation texture in thick layers. Hardness of coating with thick (80 nm) layers is 35-37 GPa. In small thickness layers pulse stimulation of atoms motility causes the formation of a planar structure with an average crystallite size of 4-9 nm in the layers, which is accompanied by increased hardness of up to 44 GPa.

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