2004
DOI: 10.1143/jjap.43.795
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Influences of Gap Distance on Plasma Characteristics in Narrow Gap Capacitively Coupled Radio-Frequency Discharge

Abstract: We study the level spacing distribution p(s) in the spectrum of random networks. According to our numerical results, the shape of p(s) in the Erdős-Rényi (E-R) random graph is determined by the average degree k and p(s) undergoes a dramatic change when k is varied around the critical point of the percolation transition, k = 1. When k 1, the p(s) is described by the statistics of the Gaussian orthogonal ensemble (GOE), one of the major statistical ensembles in Random Matrix Theory, whereas at k = 1 it follows t… Show more

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Cited by 14 publications
(6 citation statements)
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“…As E d and R increase, the Reactions (8)- (17) becomes dominant, resulting in low quality films. It has been reported that the electron temperature decreases with increasing electrode distances [23][24][25]. As the electron temperature decreases, high quality films should be produced as SiH 3 radicals become dominant.…”
Section: Discussionmentioning
confidence: 99%
“…As E d and R increase, the Reactions (8)- (17) becomes dominant, resulting in low quality films. It has been reported that the electron temperature decreases with increasing electrode distances [23][24][25]. As the electron temperature decreases, high quality films should be produced as SiH 3 radicals become dominant.…”
Section: Discussionmentioning
confidence: 99%
“…With a small gap distance, lower breakdown voltage and higher discharge current is expected [55]. Hence decreasing the discharge gap from 100 to 50 µm, increases the power density in the discharge zone [56]. As a result, a more reactive environment is expected and consequently the collision probability is increased between the reactive species in the plasma and the liquid in the channels.…”
Section: Effect Of Channel Depthmentioning
confidence: 99%
“…The RF power of 20 W is applied at 13.56 MHz to the electrode via the blocking capacitor and the matching box. A tiny cylindrical Langmuir probe, that consists of a platinum wire of 0.2 mm diameter and 5 mm length, with a parallel resonance filter [34,35] using inductance L and capacitance C, was used for measuring currentvoltage characteristics to estimate plasma parameters such as the electron temperature, density and the plasma potential. Their structures are measured based on the assumption of axial symmetry by moving the probe radially and axially, where r and z are the distances from the center and the surface of the ring-shaped hollow electrode, respectively, as shown in figure 1(b).…”
Section: Figures 1(a) and (B)mentioning
confidence: 99%