Amorphous CuZnSnS precursor lms were prepared by solgel and spin-coating with copper chloride, zinc chloride, tin chloride and thiourea solutions as starting materials. A Cu2ZnSnS4 lm with kesterite structure and a small amount of chlorine formed when the precursor was annealed under Ar ambient at temperature above 200• C, but its atomic ratios of Cu:Zn:Sn:S far deviated from stoichiometric ratios of the Cu2ZnSnS4. However, when the precursor lms were annealed with sulfur powder together at temperatures between 360 and 480• C, the CZTS lm containing a very small amount of Cl formed, and its atomic ratio change little for Cu, Zn, and Sn, increases for S and decreases for Cl with increasing temperature. When the temperature is 480• C, a CZTS only has Cu, Zn, Sn, and S element is fabricated, and the atomic ratio of Cu:Zn:Sn:S is near the stoichiometric ratio. The bandgap of the CZTS decreases with increasing annealing temperature. The mechanisms of the formation and the properties of the CZTS are suggested in the present work.