2008
DOI: 10.1088/0022-3727/41/11/115401
|View full text |Cite
|
Sign up to set email alerts
|

Information on in- and out-of-plane correlated roughness in multilayers from x-ray specular reflectivity

Abstract: Specular reflectivity measurements of artificial multilayers often exhibit a broadening of high order Bragg peaks and an intensity drop off that is slower than expected from the q −4 Fresnel dependence modified with a static Debye-Waller factor accounting for the interfacial roughness. This behaviour is described on the basis of a model that takes into account the finite size of the detector slit, which determines the instrumental resolution. The amplitude of the interface roughness as well as the in-and out-o… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
7
0

Year Published

2008
2008
2016
2016

Publication Types

Select...
5

Relationship

0
5

Authors

Journals

citations
Cited by 7 publications
(7 citation statements)
references
References 22 publications
0
7
0
Order By: Relevance
“…27 A fit with the Parratt formalism 28 gave a root mean square ͑RMS͒ interface roughness parameter of = 0.2 nm, comparable to earlier reports on similar ͓Fe/ V͔ n superlattice structures. 25,[29][30][31][32][33][34] In Fig. 2 we display Bragg scans of the same three samples in the angular range of the MgO ͑002͒ Bragg peak, where the main Bragg reflections of the epitaxial layers are expected.…”
Section: A Structural Propertiesmentioning
confidence: 99%
“…27 A fit with the Parratt formalism 28 gave a root mean square ͑RMS͒ interface roughness parameter of = 0.2 nm, comparable to earlier reports on similar ͓Fe/ V͔ n superlattice structures. 25,[29][30][31][32][33][34] In Fig. 2 we display Bragg scans of the same three samples in the angular range of the MgO ͑002͒ Bragg peak, where the main Bragg reflections of the epitaxial layers are expected.…”
Section: A Structural Propertiesmentioning
confidence: 99%
“…26 XRR accesses the layer thicknesses, the interface roughness, and the correlation function parallel and perpendicular to the layers. 27,28 Additionally, XRD provides data on the crystalline structure of the individual layers, their epitaxial relationship, and their strain state. Furthermore, transverse scans in the epitaxial plane and perpendicular to it yield information on the mosaic spreads and grain size.…”
Section: Structural Characterizationmentioning
confidence: 99%
“…For multilayers containing N layers located in ͑x ; y͒ plane, Eq. ͑1͒ can be written in the form [14][15][16][17]…”
Section: ͑1͒mentioning
confidence: 99%
“…Most of the experimental spectra show a slower decay at large angles. [15][16][17][20][21][22] This means that the contribution of diffuse scattering to the specular spectra have to be taken into account for a proper interpretation of the data.…”
Section: Analysis Of the Experimental Datamentioning
confidence: 99%