“…[10][11][12] Metal chlorides or ferrocene have been used, but their decomposition requires high temperatures and may induce contamination. [1] For [Fe(CO) 5 ] and [Mo(CO) 6 ] that decompose at lower temperatures, the main concern is also the purity of the deposit, which usually contains significant amounts of residual carbon (carbides, oxycarbides) arising from the activation of the carbonyl ligand on the metal centre. [13][14][15] Interestingly, these OM complexes are known to be active homogeneous catalysts for the water gas shift reaction (WGSR) Equation 1, [16,17] and we suggest that this reactivity could be exploited to perform deposition in the presence of water vapor, in order to decrease carbon contamination in the deposit via the metal-catalyzed formation of CO 2 and H 2 (Eq.…”