Infrared imaging

Theoretical overview of the large-area plasma processing system (LAPPS)

“…To conclude this section, we briefly note that other authors have also considered plasma processing reactors enhanced by electron beams [23,24] or enhanced electron thermal tails on the distribution function [25]. Kushner et al [23] consider a planar beam in a processing reactor and mentions the same potential advantages as in the introduction here, namely the position of the ionizing source so as to better control the nature of the plasma at the processing surface.…”

“…However they do not consider the use of a guide field, so their proposed system is not especially advantageous for large-area processing. Braithwaite [25] considers controlled amounts of non-thermal electrons (but not necessarily a beam) to enhance the ionization. With this, he points out, as we do here, that with this scheme the electron temperature can be made to be very low.…”