Infrared Spectroscopic Study of Hydrogenation Process of Si(100) Surface During Hydrogen Plasma Exposure

Shinohara, Masanori; Maruno, Naoki; Takami, Yumiko; Takabayashi, Susumu; Matsuda, Yoshinobu

doi:10.1109/tps.2016.2595599

Cited by 2 publications

(2 citation statements)

References 18 publications

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“…11 If we explain the points plotted throughout the deposition time, the slope is about 0.8. In other words, in this case, the chemical species of interest was generated by the supplied chemical species bonding to the film surface.…”

Section: Resultsmentioning

confidence: 96%

Deposition of Hydrophilic Amorphous Carbon Film with Ether as a Source Molecule and Analysis of its Deposition Reaction

et al. 2018

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A hydrophilic amorphous carbon film was deposited with plasma-enhanced chemical vapor deposition using diisopropylether ((i-C 3 H 7 ) 2 O) as a source molecule. Bonding states of hydrocarbon in the deposited film are comprised of sp 3 -hydrocarbon components, which is the same as the isopropyl group in the source molecule. On the other hand, C=O bonding is formed in the deposited film, not as similar to the source molecule, diisopropylether. These results suggest that C-O-C in the source molecule would be cleaved. This study would propose a new deposition method of a hydrophilic amorphous carbon film with ether as a source molecule. K E Y W O R D Samorphous carbon, bonding states, carboxyl, ether, hydrophilicity Electron Comm Jpn. 2019;102:3-9.

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Section: Resultsmentioning

confidence: 96%

Deposition of Hydrophilic Amorphous Carbon Film with Ether as a Source Molecule and Analysis of its Deposition Reaction

et al. 2018

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“…We postulate that, if the order is greater than the first order, more of the chemical species of interest are generated than the supplied amount of chemical species, and that chemical species are generated in the film as a result of bonding with the chemical species of the film. On the other hand, if the order is the first order or less, we postulate that many chemical species must be supplied to generate the chemical species of interest …”

Section: Resultsmentioning

confidence: 99%

Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction

Shinohara

Tominaga

Shimomura

et al. 2019

Elect Comm in Japan

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Infrared Spectroscopic Study of Hydrogenation Process of Si(100) Surface During Hydrogen Plasma Exposure

Cited by 2 publications

References 18 publications

Deposition of Hydrophilic Amorphous Carbon Film with Ether as a Source Molecule and Analysis of its Deposition Reaction

Deposition of Hydrophilic Amorphous Carbon Film with Ether as a Source Molecule and Analysis of its Deposition Reaction

Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction

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