Infrared waveguide fabrications with an E-beam evaporated chalcogenide glass film

Yang, Xiaoming; Zhang, Yaping; Syed, Ali

doi:10.1080/09500340.2014.992990

Cited by 1 publication

(1 citation statement)

References 25 publications

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“…Such tailorability allows the optical design of compact, high contrast structures, and their expanding use has been shown to be compatible with complementary metal–oxide–semiconductor fabrication methods and diverse substrates. Efforts by our team and others have specifically investigated applications such as chip-based chemical or biological sensors based on the integration of light sources, resonator arrays, and detectors. − Current research efforts target the development of low-cost, deployable, highly sensitive devices that identify a chemical by its optical fingerprint, which generally lies in the 3–5 μm wavelength range, where ChGs have good transparency . For the probing of analytes with multiple absorption wavelengths or a mixed stream of multiple analytes, it is highly desirable for the on-chip resonators to have a range of resonant wavelengths as well as a broad spectral window of transparency .…”

Section: Introductionmentioning

confidence: 99%

Direct Electrospray Printing of Gradient Refractive Index Chalcogenide Glass Films

Novak

Lin

et al. 2017

ACS Appl. Mater. Interfaces

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A spatially varying effective refractive index gradient using chalcogenide glass layers is printed on a silicon wafer using an optimized electrospray (ES) deposition process. Using solution-derived glass precursors, IR-transparent GeSbS and AsS glass films of programmed thickness are fabricated to yield a bilayer structure, resulting in an effective gradient refractive index (GRIN) film. Optical and compositional analysis tools confirm the optical and physical nature of the gradient in the resulting high-optical-quality films, demonstrating the power of direct printing of multimaterial structures compatible with planar photonic fabrication protocols. The potential application of such tailorable materials and structures as they relate to the enhancement of sensitivity in chalcogenide glass based planar chemical sensor device design is presented. This method, applicable to a broad cross section of glass compositions, shows promise in directly depositing GRIN films with tunable refractive index profiles for bulk and planar optical components and devices.

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