Inhibition of chemical interaction of molybdenum and silicon in a Mo/Si multilayer structure by the formation of intermediate compounds

Filatova, E. O.; Sakhonenkov, Sergei S.; Gaisin, Aidar U.; Konashuk, Aleksei S.; Chumakov, Ratibor G.; Плешков, Р. С.; Чхало, Н. И.

doi:10.1039/d0cp05180b

Cited by 6 publications

(2 citation statements)

References 40 publications

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“…The Mo3d spectrum contained two main doublets described by the 3d 5/2 and 3d 3/2 states. Peaks corresponding to binding energies of 227.6 and 230.8 eV indicate that molybdenum is chemically bonded to silicon [36,37]. Low-intensity peaks at positions 228.8 and 232.3 eV correspond to Mo-O bonds [38].…”

Section: Gas Flowmentioning

confidence: 99%

The Influence of Nitrogen Flow Rate on the Structure and Properties of Mo-Hf-Y-Si-B-N Coatings

Kiryukhantsev-Korneev,

Sytchenko,

Chudarin

et al. 2023

J. Compos. Sci.

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This work is devoted to the production of Mo-Hf-Y-Si-B-N coatings using magnetron sputtering with varying N2 flow rate; the analysis of magnetron discharge plasma; and the investigation of the structure, and optical, mechanical, and tribological characteristics, as well as crack resistance and oxidation resistance, of the coatings. The results show that Mo-Hf-Y-Si-B-N coatings were characterized by a dense, homogeneous structure. The non-reactive coatings had a maximum growth rate of 270 nm/min. An increase in the flow rate of N2 from 0 to 37.5 sccm led to a decrease in the growth rate by 5.4 times. Mo-Hf-Y-Si-B-N coatings were X-ray amorphous. In non-reactive coatings, the presence of Mo-Si and Mo-B bonds was revealed. The introduction of nitrogen contributed to the formation of an additional Si-N bond, an increase in the proportion of which led to an increase in transmittance. The Mo-Hf-Y-Si-B coating was characterized by a hardness value of 14 GPa. The maximum hardness of 16 GPa was observed in coatings obtained at nitrogen flow rates of 12.5 and 25.0 sccm. A further increase in the consumption of N2 to 37.5 sccm led to a decrease in hardness by 38%. The coating obtained at a flow rate of 25 sccm N2 was characterized by maximum elastic recovery of 57%, elastic strain to failure of 0.098, and resistance to plastic deformation of 0.157 GPa. An increase in nitrogen flow rate from 0 to 12.5 sccm contributed to a decrease in the wear rate of coatings under sliding friction conditions by 40%. The non-reactive Mo-Hf-Y-Si-B coating had the best oxidation resistance at 1000 °C.

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Section: Gas Flowmentioning

confidence: 99%

The Influence of Nitrogen Flow Rate on the Structure and Properties of Mo-Hf-Y-Si-B-N Coatings

Kiryukhantsev-Korneev,

Sytchenko,

Chudarin

et al. 2023

J. Compos. Sci.

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show abstract

“…This effect can be associated with For all coatings, the Mo3d spectrum contained two main doublets, described by the 3d 5/2 and 3d 3/2 states. Peaks corresponding to binding energies of 227.6 and 230.8 eV indicated that molybdenum was chemically bonded to silicon [32,33]. Low-intensity peaks at positions 228 and 231.4 eV corresponded to Mo-O bonds [34].…”

Section: Oxidation Resistancementioning

confidence: 99%

Structure and Oxidation Resistance of Mo-Y-Zr-Si-B Coatings Deposited by DCMS and HIPIMS Methods Using Mosaic Targets

Сытченко

Логинов

Nozhkina³

et al. 2023

J. Compos. Sci.

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In this study, Mo-(Y,Zr)-Si-B coatings were obtained by direct current magnetron sputtering (DCMS) and high-power impulse magnetron sputtering (HIPIMS) using mosaic targets. The results showed that the addition of Y and Zr into the composition of Mo-Si-B coatings led to the suppression of columnar grain growth, a decrease in the crystallite size of h-MoSi2 phase from ~50 to ~5 nm, and an increase in the amorphous to crystalline phases ratio Doping of the Mo-Si-B coating with Y and Zr promoted an increase in oxidation resistance at a temperature of 1000 °C. The introduction of yttrium into the composition of Mo-Si-B contributed to an increase in their crack resistance when heated to 1300 °C. High oxidation resistance of the coatings was provided by a defect-free SiO2 + MoO3 + Y2O3 surface layer. The transition from the DCMS mode to HIPIMS decreased the texture of the Mo-Si-B coatings. The use of an HIPIMS mode led to a decrease in the oxidation rate of Mo-(Y)-Si-B coatings at T = 1000 °C by 1.6–4.5 times compared to DCMS. In the case of Mo-Y-Si-B coatings, the use of HIPIMS led to a decrease of more than 50% in the thickness of the oxide layer at a temperature of 1300 °C.

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Layer intermixing in ultrathin Cr/Be layered system and impact of barrier layers on interface region

Sakhonenkov

Filatova

Kasatikov

et al. 2021

Applied Surface Science

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Inhibition of chemical interaction of molybdenum and silicon in a Mo/Si multilayer structure by the formation of intermediate compounds

Abstract: In the present study, the formation of intermediate compounds in the Mo/Si multilayer was realized by the introduction of barrier layers at the interfaces.

Cited by 6 publications

References 40 publications

The Influence of Nitrogen Flow Rate on the Structure and Properties of Mo-Hf-Y-Si-B-N Coatings

The Influence of Nitrogen Flow Rate on the Structure and Properties of Mo-Hf-Y-Si-B-N Coatings

Structure and Oxidation Resistance of Mo-Y-Zr-Si-B Coatings Deposited by DCMS and HIPIMS Methods Using Mosaic Targets

Layer intermixing in ultrathin Cr/Be layered system and impact of barrier layers on interface region

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