Inhibition of cobalt-titanium galvanic corrosion in post-CMP cleaning: Experimental and theoretical studies

Wang, Fangyuan; Ji, Jinbo; Zhang, Shihao; Tan, Baimei; Han, Xinyu; Liu, Renhao; Zhao, Xinyu; Zhao, Jiadong

doi:10.1016/j.matchemphys.2024.130293

Materials Chemistry and Physics

2025

DOI: 10.1016/j.matchemphys.2024.130293

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Inhibition of cobalt-titanium galvanic corrosion in post-CMP cleaning: Experimental and theoretical studies

Fangyuan Wang,

Jinbo Ji,

Shihao Zhang

et al.

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Inhibition of cobalt-titanium galvanic corrosion in post-CMP cleaning: Experimental and theoretical studies

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References 48 publications

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