Temperature-dependent morphology evolution of the submonolayer clusters grown on fcc metal (110) surfaces J.The molecular-beam epitaxy of CaF 2 layers on Si(111) substrates was studied in the temperature range between 370 and 700°C. A strong temperature dependence of the CaF 2 surface morphology was found. Layer-by-layer growth modes were found in two temperature ranges: (i) between 430 and 490°C, where growth of atomically flat CaF 2 epilayers occurred, and (ii) at ϳ700°C, where a step flow mode resulted in a relatively smooth CaF 2 surface containing some rough regions, possibly due to the thermal decomposition of the interface layer. At ϳ540°C, the triangular island shape observed at lower growth temperatures changed to a more hexagonal shape expected for thermodynamic equilibrium, but the top monolayer islands still exhibited a triangular shape, which can be attributed to a relatively higher lateral adatom impingement rate per unit length of island perimeter. The mechanisms of the complex temperature-dependent growth behavior are discussed in detail.