Controlled manipulation of oxide microstructure and morphology is critical to achieve the desired chemical activity in a variety of applications involving nanoscale metal oxides. The kinetics of surface oxide growth is strongly correlated to the microstructure of the developing oxide film, i.e., structure, morphology, and chemical composition. Controlling oxide microstructure and surface oxide coverage in the case of discontinuous oxide growth on metal substrates exhibiting slow oxidation kinetics remains a major challenge. In this study, molecular dynamics simulations employing dynamic charge transfer between atoms is used to investigate the initial stages of natural and electric field assisted oxidation of Ni(100) at room temperature. Surface oxygen dynamics determines the formation and evolution of the oxide domains. The increase in oxygen uptake under electric fields enhances oxide nucleation. Atomistic simulations also indicate that the surface diffusion of adsorbed oxygen can be controlled by the applied electric field and utilized to tune the growing oxide structure and morphology. In the postnucleation stage, the enhanced surface diffusion of oxygen atoms leads to a more rapid oxide growth at the perimeter of the oxide nuclei which results in a more uniform and increased nickel oxide surface coverage. The general strategy of electric field controlled oxygen incorporation and oxide growth may find wide applications in complex oxide thin film and heterostructure synthesis.