The inkjet printing technology, based on piezoelectric microjet, realizes the high-efficiency processing of special-shaped structures, and has the advantages of high precision, high efficiency, and the ability to manufacture arbitrary complex parts. In this paper, a self-priming piezoelectric micro-jet device is proposed and its structure and microjet process are described. ANSYS two-phase two-way fluid-structure coupling simulation analysis is carried out, and the mechanism of the piezoelectric microjet is described in detail. The effects of voltage amplitude, input signal frequency, nozzle diameter, and oil viscosity on the ejection performance of the device are studied, and a set of effective control methods are summarized. Finally, the correctness of the piezoelectric microjet mechanism and the feasibility of the proposed self-priming piezoelectric micro-jet device are verified by experiments, and its ejection performance is tested. The experimental results are consistent with the ANSYS simulation results, which verifies the correctness of the experiment.