2014
DOI: 10.2352/j.imagingsci.technol.2014.58.4.040403
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Inkjet-Printing for Maskless Separation of Metal Structures for Back-Contact Silicon Solar Cells

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“…Inks containing phosphorus acid were presented in the thesis of Utama to etch silicon nitride . Another direct etching process was demonstrated by Stüwe et al for the removal of metal layers. An ink consisting of a mix of organic and inorganic acids is inkjet‐printed onto metal layers and directly reacts with the metal layers at a temperature of approximately 60 °C.…”
Section: Inkjet Structuring Concepts and Suitable Inksmentioning
confidence: 99%
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“…Inks containing phosphorus acid were presented in the thesis of Utama to etch silicon nitride . Another direct etching process was demonstrated by Stüwe et al for the removal of metal layers. An ink consisting of a mix of organic and inorganic acids is inkjet‐printed onto metal layers and directly reacts with the metal layers at a temperature of approximately 60 °C.…”
Section: Inkjet Structuring Concepts and Suitable Inksmentioning
confidence: 99%
“…Using inkjet for direct etching has been investigated for the contact separation of sputtered Al and NiV, targeting the contact separation of back contact solar cells . An etchant ink, containing organic and inorganic acids, was inkjet‐printed with a Dimatix DMP 2800 series printer.…”
Section: Metallizationmentioning
confidence: 99%