The EtherCAT fieldbus system is widely applied in different types of computerized numerical control (CNC) machine tools due to its outstanding communication performance. In the field of ultra-precision CNC, some machine tools employ controllers that integrate EtherCAT master functionality to achieve real-time communication with other devices; however, the open-source IgH EtherCAT master has rarely been applied to the CNC systems of ultra-precision machine tools. The feasibility of using the IgH EtherCAT master to meet the communication performance requirements of ultra-precision machine tools remains uncertain; therefore, it is necessary to validate the control effect on precision axes under the application of the IgH EtherCAT master. In this work, EtherCAT applications were developed on a personal computer (PC) to alter it to a bus-type controller with the IgH EtherCAT master function. To provide the EtherCAT master with real-time and accurate motion data of the axes, an interpolation algorithm tailored for control experiments was designed, and a G-code data processing method was proposed. Moreover, precision aerostatic linear axes and servo drivers were chosen as EtherCAT slaves for single-axis motion and dual-axis linkage control experiments. The experimental results showed that the motion controller based on IgH can effectively control the precision axes to execute ultra-precision linear and circular interpolation motion.